The laser-interferometer and capacitive displacement sensors were used to increase the resolution of the feedback system for stage used for measuring and processing the system. However, it was difficult to obtain high-resolution measurements, consider...
The laser-interferometer and capacitive displacement sensors were used to increase the resolution of the feedback system for stage used for measuring and processing the system. However, it was difficult to obtain high-resolution measurements, considering the measuring method and structural characteristics. This type of system was installed separately from the stage. It was also difficult to apply the system to the stage. This study developed a combined magnification type stage to evaluate characteristics. As a result, it was possible to fabricate a stage with an magnification ratio of approximately 10,000, and the smallest measurable resolution was found to be at 0.7nm.