Anatase Phase TiO2 Anode of a Dye-Sensitized Solar Cell Prepared by using RMFMS

다국어 초록 (Multilingual Abstract)

Anatase phase TiO2 films were deposited by using reactive medium frequency magnetron sputtering
(RMFMS) technology under the conditions of a pure 99.9 % Ti disk as a target in an Ar+O2
atmosphere without additional external heating. The effect of the total pressure and bias on the
phase composition, grain sizes and morphologies of the TiO2 films were characterized by using X-ray
diffraction (XRD) and scanning electron microscopy (SEM). The results showed that the crystalline
anatase phase could be obtained under a total pressure of 0.4 5 Pa. The grain size of the anatase
TiO2 was between 24 37 nm at a bias of 0 −200 V. Preferred (101) growth was found to occur
at total pressures of below 1 Pa. We also discovered the existence of many holes distributed within
the TiO2 films.

다국어 초록 (Multilingual Abstract)

Anatase phase TiO2 films were deposited by using reactive medium frequency magnetron sputtering
(RMFMS) technology under the conditions of a pure 99.9 % Ti disk as a target in an Ar+O2
atmosphere without additional external heating. The effect of the total pressure and bias on the
phase composition, grain sizes and morphologies of the TiO2 films were characterized by using X-ray
diffraction (XRD) and scanning electron microscopy (SEM). The results showed that the crystalline
anatase phase could be obtained under a total pressure of 0.4 5 Pa. The grain size of the anatase
TiO2 was between 24 37 nm at a bias of 0 −200 V. Preferred (101) growth was found to occur
at total pressures of below 1 Pa. We also discovered the existence of many holes distributed within
the TiO2 films.

참고문헌 (Reference)

1 M. Gr¨atzel, 414 : 338 -, 2001

2 M. Gr¨atzel, 4 : 145 -, 2003

3 C. J. Barbe, 80 : 3157 -, 1997

4 J. M. Mwabora, 516 : 3841 -, 2008

5 G. B. Harris, 43 : 113 -, 1952

6 N. G. Park, 104 : 8989 -, 2000

7 Y. F. Lu, 153 : E131 -, 2006

8 M. G´omez, 59 : 277 -, 1999

9 X. H. Lan, 24 : 3567 -, 2007

10 hyun-ju kim, "Efficiency Enhancement of Solar Cell by Down-Conversion Effect of Eu3+ Doped LiGdF4" 한국물리학회 45 (45): 609-613, 2004

11 Haiyang Dai, "Effects of ratio of mixed gases on the surface roughness and nano-hardness of a-C:H films" 한국물리학회 52 (52): 124-127, 2008