Epitaxial Layer-by-Layer Propagation of a Patterned Surface

다국어 초록 (Multilingual Abstract)

The propagation of a patterned surface during epitaxial growth is studied by using kinetic Monte Carlo simulations. Starting with a nanostructured substrate, the pattern re-emerges after every layer, but, as growth proceeds, errors accumulate so that the pattern has a finite lifetime. The lifetime of a pattern first increases with the diffusion-to-deposition ratio as $(D/F)^{0.2}$ but then saturates to a finite value for large $D/F$ if there is sufficient diffusion along the island edges leading to compact islands. In the absence of edge diffusion, the submonolayer islands are fractal. Then, the pattern lifetime keeps increasing beyond the initial power-law dependence on $D/F$, but with a decreasing effective exponent. The lifetime also depends on the characteristic pattern size. For checkerboard patterns, the size dependence of the optimal $D/F$, for which the lifetime is longest, is analyzed.

참고문헌 (Reference)

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