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https://www.riss.kr/link?id=O39972025
1996년
jpn
학술저널
PROCEEDINGS OF THE SYMPOSIUM ON SEMICONDUCTORS AND INTEGRATED CIRCUITS TECHNOLOGY
126-131 [※수록면이 p5 이하이면, Review, Columns, Editor's Note, Abstract 등일 경우가 있습니다.]
Semiconductors and integrated circuits technology
Symposium; 51st
Tokyo
1996; Dec
0
상세조회0
다운로드
Stack Type Capacitor Technology for Giga-bit DRAM's (Invited)
Improvement of Insulating Properties in Ta~2O~5 Films by Low Temperature O~3 Annealing
Alchole Addition Enhanced Growth of CVD-Ta~2O~5 Film in Single-wafer Type Reactor
BST Films for Gbit Scale DRAM's (Invited)