영상 측정 데이터를 이용한 위치보정 레이저 가공시스템 개발 = Development of Auto Positioning Laser System by using Image Measurement Data

다국어 초록 (Multilingual Abstract)

Recently, electronic equipments become smaller, more functional, and more complex than before. As these trends, MLC(multi-layer ceramic) circuit has been emerged to a promising technology in semiconductor inspection industry. Especially, multi-layer ceramic which is consisted of many fine-pitch multi-hole is used to produce a semiconductor inspection unit. The hole is processed by UV laser. But, working conditions are changed all the time. Therefore real time measurement of fine-pitch multi-hole is very important method for ensuring performance. In this paper we found the best method for illuminating and auto focusing. And, we verified our equipment.

목차 (Table of Contents)

• ABSTRACT
• 1. 서론
• 2. 영상처리기반 측정 및 실시간 가공보정 시스템 개발
• 3. 결론
• REFERENCES

참고문헌 (Reference)

1 표창률, "영상처리기법을 이용한 그린시트 측정알고리즘 개발" 한국소성가공학회 16 (16): 313-316, 2007

2 Petros Maragos, "Tutorial on advances in morphological image processing and analysis" 26 (26): 623-623, 1987

3 K. Kawahara, "Image processing with topology and mathematical morphology" 1 : 166-174, 1997

4 M. Subbarao, "Focusing Techniques" 32 (32): 2824-2836, 1993

5 Frei, W., "Fast boundary detection : A Generalization and a New Algorithm" 26 (26): 988-998, 1977

6 A. Goshtasby, "Edge detection by curve fitting" 13 : 169-177, 1995