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장시열(Siyoul Jang),임홍재(Hong Jae Yim),강윤석(Yun Seok Kang) 한국트라이볼로지학회 2006 한국트라이볼로지학회 학술대회 Vol.2006 No.6
Surface contacts between mold and target should be in parallel for the imprinting mechanism. However, the size of contacting area makes it difficult for both mating surfaces to be in all contact because of precision level of the imprinting machine and the waviness of mold and target. The gripping force for both mold and target with the vacuum chuck is also major effect to interrupt the full contact, which must be avoided in imprinting mechanism. In this study, the preliminary study for the causes of non-uniformity of contacting surfaces such as mold and target is performed with 470 × 370㎟ LCD panel size.
진공척 흡착패드 형태에 따른 대면적 임프린팅 균일 접촉 향상 연구
장시열(Siyoul Jang) 한국트라이볼로지학회 2008 한국트라이볼로지학회지 (Tribol. Lubr.) Vol.24 No.6
The contact surfaces between mold and target should be in parallel for a proper imprinting process. However, large size of contacting area makes it difficult for both mating surfaces (mold and target planes) to be in all uniform contact with the expected precision level in terms of thickness and position. This is caused by the waviness of mold and target although it is very small relative to the area scale. The gripping force for both mold and target by the vacuum chuck is other major effect to interrupt the uniform contact, which must be avoided in imprinting mechanism. In this study, the cause of non-conformal contact mechanism between mold and target is investigated with the consideration of deformation due to the vacuum gripping for the size 470×370㎟ LCD panel.
UV 임프린트 공정에서 가압 변화에 따른 레진막 두께 형성 연구
신동혁(Dong Hyuk Shin),장시열(Siyoul Jang) 한국트라이볼로지학회 2009 한국트라이볼로지학회 학술대회 Vol.2009 No.11
The parallel contact mechanism between mold and target is the on of most important issues for the imprinting system. It is influenced by precision level of the imprinter, the waviness of mold and target and the stage motion for alignment. The uniformity of PR fluid thickness should be maintained for imprinting quality, and the ununiformity of PR fluid thickness is caused by unstable pressure distribution. In this study, we captured film shape of PR fluid film with the image processing method under several motions of contact stage. It is expected to get the information of pressure distribution by measuring the film thickness of PR fluid.
대면적 나노 임프린트 공정에서 패널과 몰드 사이의 PR 레진의 균일 분포막 측정 연구
신동혁(Dong Hyuk Shin),전종덕(Jong Duk Jeon),장시열(Siyoul Jang) 한국트라이볼로지학회 2008 한국트라이볼로지학회 학술대회 Vol.2008 No.11
The parallel contact mechanism between mold and target is the on of most important issues for the imprinting system. It is influenced by precision level of the imprinter, the waviness of mold and target and the stage motion for alignment. The uniformity of PR fluid thickness should be maintained for imprinting quality, and the ununiformity of PR fluid thickness is caused by unstable pressure distribution. In this study, we captured film shape of PR fluid film with the image processing method under several motions of contact stage. It is expected to get the information of pressure distribution by measuring tile film thickness of PR fluid.
접촉 스테이지 구동시 PR유체 유막 두께의 정성적 분석
김학수(Hak Su Kim),박준수(Jun Su Park),이덕재(Duck Jae Lee),신동혁(Dong Hyuk Shin),장시열(Siyoul Jang) 한국생산제조학회 2007 한국공작기계학회 춘계학술대회논문집 Vol.2007 No.-
The parallel contact mechanism between mold and target is the on of most important issues for the imprinting system. It is influenced by precision level of the imprinter, the waviness of mold and target and the stage motion for alignment. The uniformity of PR fluid thickness should be maintained for imprinting quality, and the ununiformity of PR fluid thickness is caused by unstable pressure distribution. In this study, we captured film shape of PR fluid film with the image processing method under several motions of contact stage. It is expected to get the information of pressure distribution by measuring the film thickness of PR fluid.
접촉 스테이지 구동시 PR유체 유막 두께의 정성적 분석
김학수(Hak Su Kim),박준수(Jun Su Park),이덕재(Duck Jae Lee),신동혁(Dong Hyuk Shin),장시열(Siyoul Jang) 한국생산제조학회 2007 한국생산제조시스템학회 학술발표대회 논문집 Vol.2007 No.5
The parallel contact mechanism between mold and target is the on of most important issues for the imprinting system. It is influenced by precision level of the imprinter, the waviness of mold and target and the stage motion for alignment. The uniformity of PR fluid thickness should be maintained for imprinting quality, and the ununiformity of PR fluid thickness is caused by unstable pressure distribution. In this study, we captured film shape of PR fluid film with the image processing method under several motions of contact stage. It is expected to get the information of pressure distribution by measuring the film thickness of PR fluid.