Quadrupole Mass Spectrometer 평가 시스템

김진태,민관식,신용현,차덕준,윤주영 한국물리학회 2012 새물리 Vol.62 No.11

An evaluation system for a quadrupole mass spectrometer (QMS) has been established, and the MDPP (minimum detectable partial pressure)has been estimated by using the evaluation system. The system enables the reliabilities of QMS sensors to be compared quantitatively and provides core data for improving the performance of a QMS. Because the MDPP is composed of both the magnitude of the ionic current and its noise, it provides more reliable reference data for tuning a QMS. One way to estimate the MDPP is to measure the QMS signal of residual H_2 gas at high vacuum. Another way is to use a mixture gas with a small amount of H_2 gas. The second way provides a more precise result. This QMS evaluation system and the MDPP provide reliable tools to compare and evaluate the performance of an ion source which is the core part of a QMS sensor. Quadrupole mass spectrometer(QMS)의 성능을 평가할 수 있는 시스템을제작하였고, 이를 이용하여 측정 가능한 최소 부분압(MDPP(Minimum Detectable Partial Pressure)) 평가기술을 개발하였다. 이것들을이용하여 QMS 센서의 신뢰성을 정량적으로 비교 평가할 수 있고 센서의성능을 개선하는데 중요한 데이터를 제공한다. MDPP는 이온 전류의크기뿐만 아니라 노이즈까지 포함하고 있어서 센서의 최적화에 신뢰성있는 단서를 제공한다. MDPP를 측정하는 방법으로 고진공에서 챔버내부에 남아있는 수소가스로 측정하거나 혹은 수소가 미량 포함된 혼합기체를 이용하여 측정하는 방법을 비교하였고, 후자의 방법으로 더정확하게 MDPP를 측정할 수 있었다. 이 측정 시스템과 MDPP는 특히 QMS 센서의 핵심 부품인 이온 생성부의 성능을 비교 평가할 수 있는 고신뢰성도구를 제공한다.

건설 품질경영시스템 심사용 전문가시스템

이동은(Lee Dong-Eun),손창백(Son Chang-Baek),임태경(Lim Tae-Kyung) 대한건축학회 2010 大韓建築學會論文集 : 構造系 Vol.26 No.7

This paper introduces an Expert System Auditing Quality Management System for Construction(AQM) which assess the performance of a Quality Management System(QMS) implemented in a construction firm. It assess the effectiveness and the confirmity level of QMS and diagnoses the nonconformity of an existing component of the QMS compared to the ISO 9000 QMS’s 20 components. The expert rule bases is constructed with the facts and rules obtained from the ISO 9000 standards. The system integrates the requirements of ISO 9000 QMS, clarifies the results of quality audits, reduce the variation between different human quality system auditors, and facilitates to make a consistent decision making involved in quality audit. It provides quality auditor with an interactive user interface, an explanation module for reasoning its conclusions, and an assisting module for understanding a specific assessment requirement. AQM contribute to the field of construction quality management, specifically to continuous quality improvement because it (1) increases the maintainability of a quality management system by making the quantification of quality performance possible, (2) fills in the gap in the construction community as a quality management system assessor, (3) increases the usability of the historical quality audit records, (3) simplifies the tedious and burdensome process involved in keeping track the progress of quality audit and in recording the audit results of the many requirements, (4) effectively handles the variability of the quality audit results attributed by different human quality system auditors. Therefore it contributes to make more rigorous quality audits and continuous quality improvement. The section entitled to "Control of inspection, measuring and test equipment", which is the 4.11 requirements of the ISO 9000 QMS, is used as a case to illustrate the system and its functions. It is implemented as an easy-to-use computerized tool programmed in MATLAB.

산화막 식각 기구 연구를 위한 QMF Ion Beam 장치의 제작

주정훈(Junghoon Joo) 한국표면공학회 2004 한국표면공학회지 Vol.37 No.4

A new ion beam extraction system is designed using a simple ion mass filter and a micro mass balance and a QMS based detecting system. A quadrupole Mass Filter is used for selective ion beam formation from inductively coupled high density plasma sources with appropriate electrostatic lens and final analyzing QMS. Also a quartz crystal microbalance is set between a QMF and a QMS to measure the etching and polymerization rate of the mass selected ion beam. An inductively coupled plasma was used as a ion/radical source which had an electron temperature of 4-8 eV and electron density of 4 × 10¹¹ #/㎤. A computer interfaced system through 12bit AD-DA board can control the pass ion mass of the qmf by setting RF/DC voltage ratio applied to the quadrupoles so that time modulation of pass ion's mass is possible. So the direct measurements of ion - surface chemistry can be possible in a resolution of 1Å/sec based on the q㎝'s sensitivity. A full set of driving software and hardware setting is successfully carried out to get fundamental plasma information of the ICP source and analysed Ar? beam was detected at the 2<SUP>nd</SUP> QMS.

오염된 QMS의 원인 분석과 세정 및 기능 복원

김동훈(Donghoon Kim),주정훈(Junghoon Joo) 한국표면공학회 2015 한국표면공학회지 Vol.48 No.4

Quadrupole Mass Spectrometers (QMS) is a very useful tool in vacuum process diagnosis. Tungsten filament based ion sources are vulnerable to contamination from process gas monitoring. Common symptoms of quadrupole mass spectrometer malfunction is appearance of unwanted contaminant mass peaks or no detection of any ion peaks. We disassembled used quadrupole mass spectrometer and found out black insulating deposits on inside of ion source parts. Five steps of cleaning procedure were applied and almost full restoration of functions were confirmed in two types of closed ion source quadrupole mass spectrometer. By using a numerical modeling (CFD-ACE+) technique, the electric potential profile of ion source with/without insulating deposit was calculated and showed the possibility of quadrupole mass spectrometer malfunction by the deterioration of designed potential profile inside the ion source.

In-situ process monitoring for eco-friendly chemical vapor deposition chamber cleaning

An Su-Rin,Choi Jeong Eun,Hong Sang Jeen 한국물리학회 2021 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.79 No.11

The use of plasma-enhanced chemical vapor deposition (PECVD) has drastically increased the development of 3D-NAND fabrication. We investigated a potential alternative method to replace the usage of NF3 in ACL deposition chamber cleaning with reasonable cleaning efficiency. Perfluoro-compounds (PFCs) have been listed as global warming gases, and NF3, which has 17,200 of 100 years GWP, is expected to be listed in a few years; thus, its usage for PECVD chamber cleaning in the semiconductor and display manufacturing industries may have restricted in the near future. To understand the plasma-cleaning phenomenon inside the PECVD chamber, we monitored the in situ plasma process using optical emission spectroscopy (OES) and quadrupole mass spectroscopy (QMS). The cleaning mechanism was revealed through the chemical species in the plasma using OES, and the presence of harmful gases in the exhaust stage was confirmed using QMS. O2, N2, and NH3 were selected as gases that could replace NF3, and the individual gases, as well as gas mixtures, were analyzed. A mixture of 20% N2 in O2 showed the highest film removal rate in ACL deposition chamber cleaning, and the gas with low GWP was released. Through this study, we propose an eco-friendly chamber cleaning method that can replace the existing method that causes global warming problems.

QMS를 이용한 플라즈마 공정 진단

주정훈 한국진공학회 2016 한국진공학회 학술발표회초록집 Vol.2016 No.2

QMS와 ICCD-OES를 이용한 모듈레이티드 펄스 스퍼터링 방법으로 증착한 Indium-Tin-Oxide (ITO)박막 공정 분석

유영군,주정훈 한국진공학회 2014 한국진공학회 학술발표회초록집 Vol.2014 No.8

QMS를 이용한 반도체 공정용 혼합 기체 조성비의 정량적 측정 기술

민관식,차덕준,윤주영,강상우,신용현,윤석래,박원영,이규찬,김진태 한국진공학회 2012 한국진공학회 학술발표회초록집 Vol.2012 No.2

정보화경영체제와 ISO 경영시스템의 효과적인 통합방안 연구

김경일 중소기업정보기술융합학회 2013 융합정보논문지 Vol.3 No.2

품질 및 정보화경영체제의 통합형태 내지 통합수준이 이 시스템의 통합효과에 미치는 영향을 알아보고자 통합 목표와 통합효과를 통합수준 내지 추진과정의 요인별로 점검하고, 통합 형태를 그 구조적 특성에 따라 분류하 여 시스템 통합의 효율성과 효과성에 이들 통합형태가 어떠한 영향을 미치는지에 대하여 연구하여 양 시스템을 도 입·운영하는 조직의 경영성과제고를 위한 시스템 통합 방안을 제시함에 본 연구의 목적이 있다. 연구결과 두 경영시 스템의 통합에 고려하게 되는 통합형태와 각 통합형태별로 도달하고 있는 통합수준 그리고 통합추진단계에 따라 궁극적으로 기대하는 통합효과가 대체적으로 유의한 차이를 보여주는 것으로 나타났다. 그러므로 앞으로 IMS와 QMS의 통합을 계획하거나 통합과정 중에 있는 기업은 이론적 고찰과 현장조사에서 입증된 사실을 감안하여 규격중 심의 통합보다는 프로세스중심의 통합형태를 또한 완벽한 통합수준의 구축에 따른 유연성과 비용효율성의 부정적 측면을 참작하여 부족한 통합수준 가운데서 자사의 실정에 적합한 통합수준을 선정하여야 할 것이다.

KS, QMS, EMS 통합경영시스템 구축 및 운영에 관한 연구 (pp.229-238)

김광수,이상훈,정순석 대한안전경영과학회 2010 대한안전경영과학회지 Vol.12 No.4