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RISS 인기검색어
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- 주제어 : PR Baking(감광액 경화) (검색결과 1 건)
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LCD 제조용 Baking Chamber의 환기 성능 평가를 위한 수치 해석
이주형(Joohyoung Lee),김태성(Teasung Kim) 대한설비공학회 2016 대한설비공학회 학술발표대회논문집 Vol.2016 No.6
Due to a fume which is evaporated from a solvent in a PR(photo resist), the inside is polluted and brings problems. A consistent temperature is required for the uniform film thickness in baking process. Also, an efficient ventilation system is necessary to prevent defect and decrease of productivity because of the fume during the baking. Generally, the ventilation efficiency is evaluated by the nominal time constant which is ratio of ventilation flow rate and inside volume. On the other hand, it is ambiguous for an arbitrary point in manufacturing larger LCD baking chamber. Evaluation of the ventilation efficiency change as a function of guide angle is researched. The flow rate is set as 1000 lpm which is more than 2 times of number of ventilation. The age of air is observed when the guide angles are varied with 30°, 40°, 50°, 60° and without the guide.
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