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RISS 인기검색어
- 검색키워드
- 주제어 : Micro-contact measurement (검색결과 3 건)
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Profile Measurements of Micro-aspheric Surfaces Using an Air-bearing Stylus with a Microprobe
Shibuya, Atsushi,Gao, Wei,Yoshikawa, Yasuo,Ju, Bing-Feng,Kiyono, Satoshi Korean Society for Precision Engineering 2007 International Journal of Precision Engineering and Vol.8 No.2
A novel scanning probe measurement system was developed to enable precise profile measurements of microaspheric surfaces. An air-bearing stylus with a microprobe was used to perform the surface profile scanning. The new system worked in a contact mode and had the capability of measuring micro-aspheric surfaces with large tilt angles and complex profiles. Due to limitations resulting from the contact mode, such as possible damage caused by the contact force and lateral resolution restrictions from the curvature of the probe tip, several system improvements were implemented. An air bearing was used to suspend the shaft of the probe to reduce the contact force, enabling fine adjustments of the contact force by changing the air pressure. The movement of the shaft was measured by a linear encoder with a scale attached to the actual shaft to avoid Abbe errors. A $50-{\mu}m-diameter$ glass sphere was bonded to the tip of the probe to improve the lateral resolution of the system. The maximum contact force of the probe was 10 mN. The shaft was capable of holding the probe continuously if the contact force was less than 40 mN, and the resolution of the probe could be as high as 10 nm, The performance of the new scanning probe measurement system was verified by experimental data.
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Profile Measurements of Micro-aspheric Surfaces Using an Air-bearing Stylus with a Microprobe
Atsushi Shibuya,Wei Gao,Yasuo Yoshikawa,Bing-Feng Ju,Satoshi Kiyono 한국정밀공학회 2007 International Journal of Precision Engineering and Vol.8 No.2
A novel scanning probe measurement system was developed to enable precise profile measurements of micro-aspheric surfaces. An air-bearing stylus with a microprobe was used to perform the surface profile scanning. The new system worked in a contact mode and had the capability of measuring micro-aspheric surfaces with large tilt angles and complex profiles. Due to limitations resulting from the contact mode, such as possible damage caused by the contact force and lateral resolution restrictions from the curvature of the probe tip, several system improvements were implemented. An air bearing was used to suspend the shaft of the probe to reduce the contact force, enabling fine adjustments of the contact force by changing the air pressure. The movement of the shaft was measured by a linear encoder with a scale attached to the actual shaft to avoid Abbe errors. A 50-㎛-diameter glass sphere was bonded to the tip of the probe to improve the lateral resolution of the system. The maximum contact force of the probe was 10 mN The shaft was capable of holding the probe continuously if the contact force was less than 40 mN, and the resolution of the probe could be as high as 10 ㎚. The performance of the new scanning probe measurement system was verified by experimental data.
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Yttrium이 첨가된 BaTiO<sub>3</sub>에서 형성된 core/shell 구조에서 shell의 TCC 거동: 독립적 관찰
전상채,Jeon, Sang-Chae 한국결정성장학회 2020 한국결정성장학회지 Vol.30 No.3
MLCC(Multi-Layer Ceramic Capacitor)의 유전체 층에 사용되는 BaTiO<sub>3</sub> 입자는 안정한 TCC(Temperature Characteristics of Capacitance) 거동을 갖기 위해 core/shell 구조를 갖는다. 지금까지 shell의 특성은 core/shell 구조의 전체 특성에서 유추해 왔다. 이는 core/shell 구조가 겨우 수 ㎛의 작은 크기로 shell 특성만 구별해서 측정하기가 어렵기 때문이다. 본 실험에서는 micro-contact법을 이용하여 확산쌍 시편의 계면에 형성된 확대된 core/shell 구조에 Pt 전극을 증착하여 35~135℃ 에서 shell 영역의 독립적인 TCC 거동을 측정하였다. 그 결과, 65℃에서 최대 유전율 값을 갖는 완만한 피크의 확산 상전이(Diffusion Phase Transition) 거동인 core의 특성과 구별되는 거동을 관찰하였으며, 이는 core/shell 구조의 온도-유전거동을 묘사하는 모델링에서 실험 자료로 활용될 것으로 본다. Grains in the BaTiO<sub>3</sub>, which is used for a dielectric layer in MLCC(Multi-Layer Ceramic Capacitor) are necessary to form core/shell structure for a stable TCC(Temperature Coefficient of Capacitance) behavior. The shell property has been deduced from the whole TCC behavior of core/shell structure due to its tiny size, ~ few ㎛. This study demonstrates the individual TCC behavior of the shell phase measured by micro-contact measurement in a temperature range between 35 and 135℃. Pt electrode pairs deposited on an enlarged core/shell structure in a diffusion couple sample made the measurement possible. As a result, the DPT (Diffusion Phase Transition) behavior of the shell phase was revealed as a different TCC behavior from that of the core: a broad peak with T<sub>m</sub> at 65℃. This would be also useful experimental data for a modelling that depicts dielectric-temperature behavior of core/shell structure.
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