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Carbon-nanotube-based Nano Electromechanical Switches
이상욱,Anders Eriksson,Abdelrahim A. Sourab,캠벨 한국물리학회 2009 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.55 No.3
The fabrication of carbon nanotube (CNT) based nano electromechanical (NEM) switches and their electro-mechanical properties are discussed. Two different types of nano electromechanical switches, a cantilever type and a doubly-clamped type, will be introduced. The proposal of three terminal structures for the CNT-based NEM switch could lead to improvements in the stability of the switching performance. Both dc electro-mechanical properties and high-frequency measurements are used to study the switching performance. A comparison of the switching performances of both types of nano electromechanical switches is discussed at the end of the paper. The fabrication of carbon nanotube (CNT) based nano electromechanical (NEM) switches and their electro-mechanical properties are discussed. Two different types of nano electromechanical switches, a cantilever type and a doubly-clamped type, will be introduced. The proposal of three terminal structures for the CNT-based NEM switch could lead to improvements in the stability of the switching performance. Both dc electro-mechanical properties and high-frequency measurements are used to study the switching performance. A comparison of the switching performances of both types of nano electromechanical switches is discussed at the end of the paper.