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정성호(Sungho Jeong),박종복(Jung-Bok Park),정문석(Mun-Seok Jeong) 대한기계학회 2010 대한기계학회 춘추학술대회 Vol.2010 No.11
Laser chemical vapor deposition (CVD) can be applied for the localized patterning of microstructures or growth of micro/nano structures. In this work, the fabrication of fine metallic and nonmetallic patterns with a characteristic dimension of below 10 um using laser CVD, metallic interconnects on glass substrate and carbon nanotube patterns on quartz substrate, is to be introduced. Also, the growth of single-walled and multiwalled carbon nanotubes by localized laser heating of multi-catalyst-layer substrates will be described.
레이저 유도 전사를 이용한 유연기판의 액체금속 미세 패터닝
조민제,지석영,조정호,장원석 한국정밀공학회 2023 한국정밀공학회지 Vol.40 No.2
We have developed a direct conductive patterning method with micro-scale line widths using the laser-induced-forward transfer (LIFT) and liquid metal. As this method does not need post-thermal processing, there is no thermal damage even on heat-sensitive polymer substrates by low-power laser irradiation on the dynamic release layer (DRL). Unlike other liquid metal patterning processes, this procedure can easily achieve fine line widths of a few tens of micrometers corresponding to laser spot size. The solid-state UV pulse laser with 266 nm wavelength and 20 ns pulse duration was used to transfer Eutectic Gallium Indium (EGaIn) liquid metal and the results for the single and multi-pulse laser irradiation were investigated to determine the effective process conditions. The applicability of flexible circuit fabrication and selective circuit repair was successfully tested on Polyimide (PI) substrate. After the LIFT process, the electrical properties of liquid metal on the pattern were measured to be approximately 5~8 x 10-3 Ω/m of resistance.