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신민철(Min Chul Shin),박지원(Ji Won Pack),김규만(Gyu Man kim) 대한기계학회 2021 대한기계학회 춘추학술대회 Vol.2021 No.10
역-방전가공(Reverse-Electric Discharge Machining)은 기존 방전가공과 달리 가공된 영역을 갖는 금속패턴을 전극으로 사용하며 이는 MEMS의 Negative Photoresist와 비슷한 역할을 한다. 전압을 인가한 금속과 피가공물의 간극이 미소한 거리로 좁혀질 때 전기에 의한 열에너지가 가공된 영역을 제외한 형상 그대로 피가공물에 전사되는 원리이다. 역-방전가공의 장점을 활용하면 단단한 재료와 복잡한 형상의 가공이 가능하며 높은 세장비의 미세공구, 전극, 니들 등 다양한 연구 분야에 적용이 가능하다. 본 연구에서는 방전가공을 통해 금속 시편에 직경 200um의 홀 어레이 패턴을 가공하였고, 금속시편에 홀어레이 패턴을 역-방전가공을 통해 초경합금에 패턴을 전사시켜 다중 미세전극을 제작하였다. 제작된 공구를 사용하여 방전가공을 진행하고 가공조건에 따른 가공특성을 비교 분석하였다. Reverse-Electric Discharge Machining is different from general electric discharge machining and uses a metal pattern with a machined area as an electrode, which plays a similar role to the negative photoresist of the MEMS process. When the gap is narrowed to a minute distance after applying a voltage to the metal pattern and the workpiece, the thermal energy of electricity removes the workpiece as it is in the pattern. By using the advantages of the processing method, it is possible to process hardness materials and complex shapes, and it can be used in various research fields such as high aspect ratio micro tools, electrodes, and needles. In this study, a hole array pattern with a diameter of 200μm was machined on a metal plate through electric discharge machining, and a multiple microelectrode was fabricated using R-EDM. EDM was performed using a multiple micro electrode, and a study was conducted on comparative analysis of characteristics according to processing conditions.
마이크로 마스크를 가진 미세입자분사가공을 위한 가공경로의 생성
김호찬(Ho-Chan Kim),이인환(In-Hwan Lee),고태조(Tae-Jo Ko) 한국기계가공학회 2011 한국기계가공학회지 Vol.10 No.6
Micro-abrasive jet machining(μAJM) using mask is a fine machining technology which can carve a figure on a material. The mask should have holes exactly same as the required figure. Abrasive particles are jetted into the holes of the mask and it collide with the material. The collision break off small portion of the material. And the μAJM nozzle should move all over the machining area. However, in general the carving shape is modeled as in a bitmap figure, because it often contains characters. And the mask model is also often modeled from the bitmap image. Therefore, the machining path of the μAJM also efficient if it can be generated from the bitmap image. This paper suggest an algorithm which can generate μAJM tool path directly from the bitmap image of the carving figure. And shows some test results and applications.
제순규(Soon-Kyu Je),김광열(Kwang-Ryul Kim),강명창(Myung-Chang Kang),정영근(Young-Keun Cheong),김광호(Kwang-Ho Kim),신보성(Sung-Hak Cho),김재구(Jae-Goo Kim),박홍진(Hong-Jin Park) 한국기계가공학회 2007 한국기계가공학회 춘추계학술대회 논문집 Vol.2007 No.-
Laser micromachining is very useful method to process the thin Si wafer directly. Silicone is one of the semiconductor materials which energy band gap is 1.107 eV in normal temperature. Therefore it is necessary to select laser wavelength of 1116nm to process silicone. To be obtained single photon excitation, we select Nd:YAG laser of 1064 nm. In this paper, we studied the phenomena of laser micro machining, compared and analyzed the experimental results processed by various laser systems..
윤재웅,양민양 대한기계학회 1990 대한기계학회논문집 Vol.14 No.5
본 연구에서는 초음파 화학 가공(ultrasonicassisted chemical mahining)을 이용하여 100$\mu\textrm{m}$이하의 전극봉을 제작하였고 제작한 전극을 이용하여 미세구멍을 방전 가공함으로써 가공특성을 파악하고, 방전액을 각각 등유(kerosene)와 물로하여 구멍의 표면을 비교, 분석하였으며 전극의 지름, 가공물의 두께에 대한 오버컷과 경사도(tap- er) 그리고 전극의 마멸을 조사하였다. Micro-hole drilling by EDM and production of fine rods for the tool electrode or other purpose have become very important in industry. This paper suggests a new method for production of very fine rods by ultrasonic-assisted chemical machining and describes the machining characteristics of micro-hole drilling by EDM. For fine rods, copper wires of initial diameter of 250.mum are used and successfully machined into a diameter of less than 30.mum with good repeatability. The ultrasonic agitation not only accelerated the material removal rate uniformly, but also produced smooth surfaces of fine rods. To drill the micro-hole, kerosene and pure water is used as a dielectric. From the experiment, water is superior to kerosene with respect to surface roughness of inlet and outlet of hole and machined surface as well as electrode wear. However, due to the electrochemical reaction of water, small pits are remained on the workpiece surface.
허세곤(Se-Gon Heo),이원균(Won-Kyun Lee),민병권(Byung-Kwon Min),제태진(Tae-Jin Je) 한국기계가공학회 2012 한국기계가공학회지 Vol.11 No.2
Recently, micromilling process has been progressed to meet the variety of the industry demands in micromolds and precision components. As a result, more and more commercialized micro tools and machines become available during last few years. This paper reviews the recent progress of micromilling technology in last five years. The results in process, machine tools, and micro tool fabrications are discussed.
김근영(Keun-Young Kim),김우곤(Woo-Gon Kim),김영일(Young-Il Kim),강명창(Myung-Chang Kang) 한국기계가공학회 2008 한국기계가공학회 춘추계학술대회 논문집 Vol.2008 No.-
Recently the needs of integrated system for micromachining and measurement have been increasing with advent of micro-factory system. Also high hardness materials have been much used. It is difficult to machine these materials by conventional machining. Such materials can be easily machined by EDM because hardness is not a effect parameter in EDM. Therefore, in this paper, integrated EDM machine for micro-hole machining and measurement was developed.
송기형(Ki-Hyeong Song),이동윤(Dong-Yoon Lee),박경희(Kyung-Hee Park),이석우(Seok-Woo Lee),김현철(Hyun-Cheol Kim),제태진(Tae-Jin Je) 한국기계가공학회 2012 한국기계가공학회지 Vol.11 No.2
In order to cope with the requirements of smaller patterns, larger surfaces and lower costs in the fields of displays, optics and energy, greater attentions are now being paid to the development of micro-pattern machining technology. Compared with flat moulds, large drums with micro patterns (roll moulds) have the advantages of short delivery, ease of manufacturing larger surfaces, and continuous moulding. This paper introduced the machining process technology of the roll moulds for display industry. The environmental effects were discussed and the importance of temperature aintenance was experimentally emphasized. The real time monitoring system for micro machining was introduced. A commercial solution was used to simulate the micro grooving and a deformation model of micro machined pattern was finally introduced.
김건희(Geon-Hee Kim),김윤중(Youn-Joong Kim),국명호(Myung-Ho Kook),이선규(Sun-Kyu Lee),홍권희(Kweon-Hee Hong) 한국기계가공학회 2007 한국기계가공학회지 Vol.6 No.2
This paper describes development of low cost precision machine that has a vacuum chuck. This study mainly aims to find out a cutting condition for maintaining optimum surface condition and to examine cutting characteristics of the precision machine that is equipped by diamond bites. The cutting materials is oxygen free copper. Several experiments were carried out to find out the main factors that affect the surface roughness such as principal axis RPM(rotation per minute), feeding speed, and cutting depth. As a result, we obtain The optimum cutting condition of the developed precision machine.
Electrochemical Machining of Tungsten Carbide Microshaft
이강희,Lee, Kang-Hee The Korean Society of Manufacturing Technology Eng 2010 한국공작기계학회지 Vol.19 No.3
본 연구에서는 전해가공을 이용해서 직경이 균일한 텅스텐 카바이드 미세축을 제작하는 실험을 수행하였다. 전해가공을 통해 미세축으로 사용 가능한 형상을 얻기 위한 최적의 가공 조건에 대해 고찰하였다 이 과정에서 미세축의 형상에 영향을 주는 여러 인자들을 적절하게 조절하여 최적의 형상을 얻을 수 있었다. 그리고 가공된 미세축을 이용하여 적절한 조건으로 2차, 3차 가공을 수행하여 초미세축을 가공할 수 있음을 보였다. 그리하여 실험 결과 직경 $30{\mu}m$, 길이 $500{\mu}m$의 텅스텐 카바이드 미세축을 제작하였다. Tungsten carbide microshaft is used as micro punch, electrode of micro electro discharge machining, and micro tool because of its high hardness and rigidity. In this research, tungsten carbide microshaft was fabricated using electrochemical machining. $H_2SO_4$ solution was used as the electrolyte because it can dissolve tungsten carbide and cobalt simultaneously. Experimentally studied were the effects of electrolyte concentration, machining time, and machining voltage on material removal rate and the shape of the microshaft. To eliminate the effects of bubbles and metal corrosion layer on microshaft shape, the machining was performed below the electrolysis voltage. Three step electrochemical process was suggested to fabricate the straight tungsten carbide microshaft. As a result, a straight tungsten carbide microshaft of $30{\mu}m$ in diameter and $500{\mu}m$ in length was obtained through the proposed three step electrochemical process.
전도성을 가지는 탄소나노튜브강화 알루미나복합소재의 마이크로방전가공에서 초음파진동 부가에 의한 가공특성
강명창(Myung-Chang Kang),탁현석(Hyun-Seok Tak),이창훈(Chang-Hoon Lee),김남경(Nam-Kyung Kim) 한국기계가공학회 2014 한국기계가공학회지 Vol.13 No.6
Micro-holes of conductive ceramic are required in micro structures. Micro-electrical discharge machining (Micro-EDM) is an effective machining method since EDM is as process for shaping hard metals and complex-shaped holes by spark erosion in all kinds of electro-conductive materials. However, as the depth of micro hole increases, the machining condition becomes more unstable due to inefficient removal of debris between the electrode and the workpiece. In this paper, micro-EDM was performed to evaluate machining characteristic such as electrode wear, machining time, taper angle, radial clearance with varying voltage and ultrasonic vibration on 10 vol.% Carbon-nanotube reinforced conductive Al₂O₃ composite fabricated by spark plasma sintering in previous research.