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최재석(Jae Seok Choi),홍상준(Sang-Joon Hong),유정훈(Jeonghoon Yoo),김태현(Tae-Hyun Kim),이성진(Sung Jin Lee) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
This research tries to compute the attractive force between Coulomb type electrostatic chuck(ESC) and liquid-crystal display(LCD) panel using the finite element analysis and confirms the influence of the air gap upon the attractive force. The air gap exists between LCD panel and the dielectric layer of the ESC and its thickness is below a few hundreds nanometers. The attractive force acting on perpendicular direction to the ESC can be obtained by applying the force calculation method, called the Maxwell stress tensor. In conclusion, the modeling of the air gap is essential to derive the attractive force of the ESC.
고홍석,김광준,Go, Hong-Seok,Kim, Gwang-Jun 대한기계학회 2000 大韓機械學會論文集A Vol.24 No.7
One of the principal sources of vibration and noise in permanent magnetic machines is cogging torque, which is induced by interaction between the rotor poles and the stator teeth. For its analysis, using finite element analysis is very time consuming and the calculation of performance factors is extremely sensitive to the discretization. Especially, Maxwell stress tensor method is sensitive to the location of integral path. In this paper, a cogging permeance fuction is defined and replaced by the straight line. And it is assumed that the flux density acting on the stator's tooth side is the euqal to the flux density of the slot area. Using this definition and assumption, analytical calculation of cogging torque is presented and validated. And several reduction method is introduced.