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CFUBMS을 이용한 ZrCrAIN 나노복합 박막의 구조와 기계적 특성
김연준(Youn J. Kim),이호영(Ho Y. Lee),신경식(Kyung S. Shin),정우성(Woo S. Jung),한전건(Jeon G. Han) 한국표면공학회 2005 한국표면공학회지 Vol.38 No.5
The quaternary ZrCrAlN nanocomposite thin films are synthesized by Closed-Field Unbalanced Magnetron Sputtering (CFUBMS). Microstructure and mechanical properties of ZrCrAlN nanocomposite thin films are studied. Grain refinement of ZrCrA1N nanocomposite thin film is occurred by controlling N₂ partial pressure. Maximum hardness value according to the various N₂ partial pressures is obtained at 45 ㎬. It is also conformed that critical value of the grain size (d) needs to achieve the maximum hardness.
CFUBMS을 이용한 TiZrAlN 나노복합 박막의 미세 구조와 기계적 특성
김연준(Youn J. Kim),이호영(Ho Y. Lee),김용모(Yong M. Kim),김갑석(Kab S. Kim),한전건(Jeon G. Han) 한국표면공학회 2007 한국표면공학회지 Vol.40 No.1
Quaternary TiZrAlN nanocomposite thin films were synthesized by Closed-Field Unbalanced Magnetron Sputtering (CFUBMS), and their microstructure and mechanical characteristics were examined. The grain refinement of the TiZrAlN nanocomposite thin films was controlled by adjusting the N₂ partial pressure. The hardness of the film varied with the N₂ partial pressure and the maximum value was obtained approximately 47 ㎬. It was also confirmed that there is a critical value of the grain size (dc) to need maximum hardness.