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A High Speed and Compact System for Profile Measurement of Scroll Compressors
Yoshikazu Arai,Akinori Inada,JianHong Yang,Wei Gao 한국정밀공학회 2009 International Journal of Precision Engineering and Vol.10 No.5
Profile measurement of a scroll compressor is important for improving compression efficiency. This paper describes the height profile measurement of a scroll compressor in the manufacturing line using a prototype measurement system. A commercial CMM is also employed for comparison. The measurement repeatability of the height profile by the prototype measurement system is approximately ±1 μm, which satisfies the requirements from the manufacturing line. Through compensation of the tilt component, result of the prototype measurement system is in good agreement with that of the commercial CMM.
Nakaoka, Yoshikazu,Nishida, Keigo,Narimatsu, Masahiro,Kamiya, Atsunori,Minami, Takashi,Sawa, Hirofumi,Okawa, Katsuya,Fujio, Yasushi,Koyama, Tatsuya,Maeda, Makiko,Sone, Manami,Yamasaki, Satoru,Arai, Yu American Society for Clinical Investigation 2007 The Journal of clinical investigation Vol.117 No.7
A High-speed Atomic Force Microscope for Precision Measurement of Microstructured Surfaces
Cui, Yuguo,Arai, Yoshikazu,Asai, Takemi,Ju, BinFeng,Gao, Wei Korean Society for Precision Engineering 2008 International Journal of Precision Engineering and Vol.9 No.3
This paper describes a contact atomic force microscope (AFM) that can be used for high-speed precision measurements of microstructured surfaces. The AFM is composed of an air-bearing X stage, an air-bearing spindle with the axis of rotation in the Z direction, and an AFM probe unit. The traversing distance and maximum speed of the X stage are 300 mm and 400 mm/s, respectively. The spindle has the ability to hold a sample in a vacuum chuck with a maximum diameter of 130 mm and has a maximum rotation speed of 300 rpm. The bandwidth of the AFM probe unit in an open loop control circuit is more than 40 kHz. To achieve precision measurements of microstructured surfaces with slopes, a scanning strategy combining constant height measurements with a slope compensation technique is proposed. In this scanning strategy, the Z direction PZT actuator of the AFM probe unit is employed to compensate for the slope of the sample surface while the microstructures are scanned by the AFM probe at a constant height. The precision of such a scanning strategy is demonstrated by obtaining profile measurements of a microstructure surface at a series of scanning speeds ranging from 0.1 to 20.0 mm/s.
A High-speed Atomic Force Microscope for Precision Measurement of Microstructured Surfaces
Yuguo Cui,Yoshikazu Arai,Takemi Asai,BinFeng Ju,Wei Gao 한국정밀공학회 2008 International Journal of Precision Engineering and Vol.9 No.3
This paper describes a contact atomic force microscope (AFM) that can be used for high-speed precision measurements of microstructured surfaces. The AFM is composed of an air-bearing X stage, an air-bearing spindle with the axis of rotation in the Z direction, and an AFM probe unit. The traversing distance and maximum speed of the X stage are 300 ㎜ and 400 ㎜/s, respectively. The spindle has the ability to hold a sample in a vacuum chuck with a maximum diameter of 130 ㎜ and has a maximum rotation speed of 300 rpm. The bandwidth of the AFM probe unit in an open loop control circuit is more than 40 ㎑. To achieve precision measurements of microstructured surfaces with slopes, a scanning strategy combining constant height measurements with a slope compensation technique is proposed. In this scanning strategy, the Z direction PZT actuator of the AFM probe unit is employed to compensate for the slope of the sample surface while the microstructures are scanned by the AFM probe at a constant height. The precision of such a scanning strategy is demonstrated by obtaining profile measurements of a microstructure surface at a series of scanning speeds ranging from 0.1 to 20.0 ㎜/s.
이강원,노영진,Wei Gao,Yoshikazu Arai,Yuki Shimizu,Katsutoshi Tanaka,Masahiko Fukuta,Yoshiaki Kai 한국정밀공학회 2011 International Journal of Precision Engineering and Vol. No.
This paper presents the experimental results of investigating the performances of an air-bearing displacement sensor for surface form measurement of micro-structures, such as micro-lenses, on an ultra-precision machine tool. The sensor consists of a stylus for contacting the surface, a shaft for mounting the stylus, an air-bearing for suspending the shaft and a blade spring for applying the measuring force against the surface. At first, experiments were conducted on a vibration isolated table to identify the basic performance of the sensor for displacement measurement. Then, the sensor was mounted on a diamond turning machine for evaluating the performance of the sensor for on-machine surface form measurement of micro-lenses. A roll workpiece, on which a micro-lens array was fabricated by using a fast tool servo on the diamond turning machine, was employed as the specimen for the on-machine experiment of surface profile measurement.
Fabrication of Large-area Micro-lens Arrays with Fast Tool Control
Noh, Young-Jin,Arai, Yoshikazu,Tano, Makoto,Gao, Wei Korean Society for Precision Engineering 2008 International Journal of Precision Engineering and Vol.9 No.4
This paper describes a fast tool control (FTC)-based diamond turning process for fabricating large-area high-quality micro-lens arrays. The developed FTC unit has a stroke of $48{\mu}m$ and a resonance frequency of 4.9 kHz. Micro-lens arrays were fabricated using a micro-cutting tool with a nose radius of $50{\mu}m$. The FTC unit was integrated with a force sensor so that the initial position of the micro-cutting tool with respect to the workpiece surface could be detected through monitoring the contacting force. The length and depth of the designed parabolic micro-lens profile were $190{\mu}m$ and $20{\mu}m$, respectively. A micro-lens array was fabricated on a cylinder surface over an area of ${\phi}55 mm{\times}40 mm$.
Fabrication of Large-area Micro-lens Arrays with Fast Tool Control
Young Jin Noh,Yoshikazu Arai,Makoto Tano,Wei Gao 한국정밀공학회 2008 International Journal of Precision Engineering and Vol.9 No.4
This paper describes a fast tool control (FTC)-based diamond turning process for fabricating large-area high-quality micro-lens arrays. The developed FTC unit has a stroke of 48 ㎛ and a resonance frequency of 4.9 kHz. Micro-lens arrays were fabricated using a micro-cutting tool with a nose radius of 50 ㎛. The FTC unit was integrated 'with a force sensor so that the initial position of the micro-cutting tool with respect 10 the workpiece surface could be detected through monitoring the contacting force. The length and depth of the designed parabolic micro-lens profile were 190 ㎛ and 20㎛, respectively. A micro-lens array was fabricated on a cylinder surface over an area of φ 55 ㎜ × 40 ㎜.