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김양진(Yangjin Kim) 한국생산제조학회 2010 한국생산제조학회지 Vol.19 No.6
Rib structure has been used to bed and column of machine tool to heighten weight stiffness ratio, cost performance and weight saving. In this paper the bed rib structure was estimated with thermal characteristics. Using superposition principle, machine tool designer can describe every complicated heat generation in the machine tool thermal source. As thermal characteristics, thermal deformation of guide rail and column and Maximum-minimum temperature variation were selected. The size, configuration and direction against the thermal loading surface operated to the thermal characteristics. The DB chart was made following rib structure estimating thermal characteristics. With superposition principle and DB chart, machine tool designer can prognosticate the thermal characteristics without FEM analysis to every bed rib structure.
김양진(Yangjin Kim),이찬홍(Chanhong Lee) 한국생산제조학회 2010 한국생산제조학회지 Vol.19 No.6
A method has been developed to tune the static stiffness at a rotation joint considering the whole machine tool system by interactive use of finite element method and experiment. This paper describes the procedure of this method and shows the results. The method uses the static experiment on measurement model which is set-up so that the effects of uncertain factors can be excluded. For FEM simulation, the rotation joint model is simplified using only spindle, bearing and spring. At the rotation joint, the damping coefficient is ignored. The spindle and bearing is connected by only spring. By static experiment, 500 N is forced to the front and behind portion of spindle and the deformation is measured by capacitive sensor. The deformation by FEM simulation is extracted with changing the static stiffness from the initial static stiffness considering only rotation joint. The tuning static stiffness is obtained by exploring the static stiffness directly trusting the deformation from the static experiment. Finally, the general tuning method of the static stiffness of machine tool joint is proposed using the force stream and the modal analysis of machine tool.
이동 열원을 고려한 공작기계 칼럼 리브의 열특성 평가 기법
김양진(Yangjin KIM),이찬홍(Chanhong LEE) 한국생산제조학회 2011 한국생산제조시스템학회 학술발표대회 논문집 Vol.2011 No.4
Rib structure has been used to column of machine tool to heighten weight stiffness ratio, cost performance and weight saving. In this paper the column rib structure was estimated with thermal characteristics. As thermal characteristics, thermal deformation inclination of and column and maximum-minimum temperature variation were selected. The DB chart was made following rib structure estimating thermal characteristics. With DB chart, machine tool designer can prognosticate the thermal characteristics without FEM analysis to every bed rib structure.
광학적 표면 형상과 두께 측정을 위한 유연 위상 추출 알고리즘 개발
김환(Hwan Kim),전주림(Jurim Jeon),김성태(Sungtae Kim),김양진(Yangjin Kim) 대한기계학회 2022 대한기계학회 춘추학술대회 Vol.2022 No.11
When measuring the optical surface shape and thickness of a transparent plate, wavelength-turning interferometry has been widely used. However, when the wavelength-turning interferometer is utilized, the various types of the phase-shift errors occur. These errors include the errors due to the harmonic components, phase-shift linear and nonlinear errors. In this research, we proposed two 15-sample phase-extraction algorithms that can suppress these phase-shift errors. The first is the algorithm for optical surface shape that can suppress coupling errors between harmonic signals and phaseshift linear and nonlinear errors. The second is the algorithm for optical thickness that can compensate the spatially uniform error including the coupling errors. The characteristics of two 15-sample phase-extraction algorithms were discussed by Fourier representation in the frequency domain and characteristic polynomial in the complex plane. The error-suppression performance can be confirmed from the root-mean-square error for the first algorithm and calculated phase errors with the second algorithm.
광학적 표면 형상과 두께 측정을 위한 유연 위상 추출 알고리즘 개발
김환(Hwan Kim),전주림(Jurim Jeon),김성태(Sungtae Kim),김양진(Yangjin Kim) 대한기계학회 2022 대한기계학회 춘추학술대회 Vol.2022 No.11
When measuring the optical surface shape and thickness of a transparent plate, wavelength-turning interferometry has been widely used. However, when the wavelength-turning interferometer is utilized, the various types of the phase-shift errors occur. These errors include the errors due to the harmonic components, phase-shift linear and nonlinear errors. In this research, we proposed two 15-sample phase-extraction algorithms that can suppress these phase-shift errors. The first is the algorithm for optical surface shape that can suppress coupling errors between harmonic signals and phaseshift linear and nonlinear errors. The second is the algorithm for optical thickness that can compensate the spatially uniform error including the coupling errors. The characteristics of two 15-sample phase-extraction algorithms were discussed by Fourier representation in the frequency domain and characteristic polynomial in the complex plane. The error-suppression performance can be confirmed from the root-mean-square error for the first algorithm and calculated phase errors with the second algorithm.
고조파 위상 반복 분석법과 파장 주사 간섭법을 이용한 실리콘 웨이퍼의 표면형상 측정
김성태(Sungtae Kim),김양진(Yangjin Kim) 대한기계학회 2022 大韓機械學會論文集A Vol.46 No.6
파장 주사 간섭법은 고해상도 및 비접촉 측정이 가능하여 실리콘 웨이퍼의 표면형상 측정에 사용된다. 하지만, 2차 고조파와 비선형 위상 변조로 인해 측정 정밀도가 저하될 수 있다. 본 연구에서는 고조파와 비선형 위상 변조를 억제하면서 실리콘 웨이퍼의 표면 형상을 측정할 수 있는 고조파 위상 반복해석법을 개발하였다. 실리콘 웨이퍼의 반사율과 고조파 성분을 고려하여 고조파 위상 반복 해석법을 도출하였다. 또한, 제안된 분석법에 고조파 수렴조건 및 픽셀 선택 기법을 결합하여 위상 추출 성능을 향상시켰다. 마지막으로 파장 주사 Fizeau 간섭계로 측정된 5장의 간섭무늬와 고조파 위상 반복 분석법을 이용하여 실리콘 웨이퍼의 표면 형상을 측정하였으며, 검증 실험의 반복 오차는 2.617 nm였다. Wavelength-tuning interferometry has been used in surface profiling of silicon wafers because of its high-resolution and noncontact measurement. However, its measurement accuracy suffers from the second-order harmonics and nonlinear phase modulation. In this study, a harmonic phase-iterative analysis that can suppress the harmonics and nonlinear phase modulation was developed to profile the surface of a silicon wafer. Considering the reflection factor of the silicon wafer and harmonic components, the proposed harmonic phase-iterative analysis was derived. Moreover, by combining the proposed analysis with the harmonic convergence condition and selected pixel technique, the phase-extraction ability of the proposed analysis framework was improved. Finally, the surface of the silicon wafer was measured using the harmonic phase-iterative analysis and five-frame interferograms obtained using a wavelength-tuning Fizeau interferometer. The repeatability error of surface profiling was 2.617 nm.