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Structural Characteristics of Sputter-Deposited Pb(Zr,Ti)O3/ZnO Heterostructure Films
윤종걸,Ya. I. Alivov,F. Agra,B. Xiao,S. Chevtchenko,H. Morkoc 한국물리학회 2008 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.53 No.4
The structural properties of PbZr0:52Ti0:48O3 (PZT)/ZnO heterostructure films deposited on sapphire substrates by rf-sputtering were investigated using X-ray diffraction and atomic force microscopy for various deposition and annealing temperatures. Pure perovskite PZT films with smooth surface morphologies could be obtained by depositing the films at 650 ℃ and subsequent oxygen annealing at the same temperature. The post-annealing in oxygen also enhanced both the (111) orientation of the PZT films and the pyrochlore-to-perovskite phase transformation. The structural symmetry at the interface of PZT/ZnO heterostructures is discussed in conjunction with the crystalline orientations of PZT film, which favors (111)- and (110)-orientations of PZT films on (0001) ZnO during growth and the subsequent annealing process.