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RISS 인기검색어
- 검색키워드
- 저자 : Wen-Hsing Kao (검색결과 2 건)
- 무료
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Applying Boolean logic algorithm for photomask pattern design
Wen-Hsing Kao,Bo-Shen Liou,Wen-Hsiang Shen,Yung-Lung Tsou 한국정보기술융합학회 2013 JoC Vol.4 No.2
The reason for the trend in high-level large-area photomasks is that mask size is becoming larger and the line size and gap design is becoming thinner. In addition, the uniformity requirements for producing photomasks are becoming stricter. Consequently, the difficulties faced in manufacturing photomasks have substantially increased and a particular graphic process is required to assist with improving the yield of photomask production. During the etching process of mask production, a non-uniform etching rate produces an inferior uniformity of the critical dimensions. The reasons for the inferior etching rate results include the uniformity of the photomask pattern, the spin speed of the etching machine, and the nozzle of the etching arms. This research focuses on the photomask pattern line-width compensation for improving uniformity and precision. The research combines logical operations to select the patterns that are necessary for special compensation, adding the appropriate compensation value to the pattern and combining it with the original pattern to generate a complete photomask pattern to compensate for the inferior etching rate that produces inferior line-width uniformity.
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Confirmation of Large Super-fast Rotator (144977) 2005 EC <sub>127</sub>
Chang, Chan-Kao,Lin, Hsing-Wen,Ip, Wing-Huen,Lin, Zhong-Yi,Kupfer, Thomas,Prince, Thomas A.,Ye, Quan-Zhi,Laher, Russ R.,Lee, Hee-Jae,Moon, Hong-Kyu American Astronomical Society 2017 ASTROPHYSICAL JOURNAL LETTERS - Vol.840 No.2
<P>(144977) 2005 EC127 is a V-/A-type inner-main-belt asteroid with a diameter of 0.6 +/- 0.1. km. Asteroids of this size are believed to have rubble-pile structure, and therefore cannot have a rotation period shorter than 2.2 hr. However, our measurements show that asteroid 2005 EC127 completes one rotation in 1.65 +/- 0.01. hr with a peakto-peak light-curve variation of similar to 0.5. mag. Therefore, this asteroid is identified as a large super-fast rotator. Either a rubble-pile asteroid with a bulk density of rho similar to 6 g. cm(-3) or an asteroid with an internal cohesion of 47 +/- 30. Pa can explain 2005 EC127. However, the scenario of high bulk density is very unlikely for asteroids. To date, only six large super-fast rotators, including 2005 EC127, have been reported, and this number is very small when compared with the much more numerous fast rotators. We also note that none of the six reporting large SFRs are classified as C-type asteroids.</P>
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