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C. G. Granqvist,L. F. Reyes,P. Heszler,V. Lantto,A. Hoel 한국물리학회 2004 Current Applied Physics Vol.4 No.5
Nanocrystalline WO3 lms were prepared by gas evaporation and deposition. Their gas-sensing properties were investigated intwo types of devices. Firstly, the lms were exposed to a set of probing gases while the mean conductance change was recorded atvarious gas concentrations and temperatures. For example, 5 ppm of H2S yielded a conductance increase by. 250 times even atroom temperature, and doping by Al or Au enhanced the sensitivity still further. The maximum sensitivity for H2S, N2O, and COwas found at 400, 525, and 700 K, respectively. For another sensor arrangement, conduction noise was measured in the 0.545 Hzfrequency range for thin Au lms covered with WO3 nanoparticles. The power density of the conductance uctuations was increasedby about two orders of magnitude after alcohol exposure, while the mean resistance changed by less than 0.3%, thus showing thepotential of uctuation-based gas sensing.