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- 저자 : Takayuki Meguro (검색결과 1 건)
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Siew Leng Tan,Yuki Shimizu,Takayuki Meguro,So Ito,Wei Gao 한국정밀공학회 2015 International Journal of Precision Engineering and Vol. No.
This paper presents the design and construction of a laser autocollimator-based optical sensor for measurement of the tilt angles ofa reflector mounted on the guideways or the moving table of a precision linear slide in the production process of the slide, wherethe measurement is repeatedly carried out together with a hand scraping operation for correction of the form errors of the slideguideways. Differing from a conventional autocollimator, a laser rangefinder unit is integrated with the autocollimation unit fordetection of the positions of the reflector, which is necessary for the efficient error correction of the slide guideways. Theautocollimation unit and the rangefinder unit share the same light source for a compact optical design. The optical power of the laserbeam is first set to be constant for tilt angles measurement. Then the optical power is modulated with a frequency of 66.7 MHz formeasuring the position/distance based on the phase shift method. The resolution of the laser autocollimator is confirmed to be 0.2arc-second over a range of ±50 arc-seconds while the measurement positions can be detected with a resolution of 1 mm by therangefinder, which satisfies the requirements from production of the slide.
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