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In-situ process monitoring for eco-friendly chemical vapor deposition chamber cleaning
An Su-Rin,Choi Jeong Eun,Hong Sang Jeen 한국물리학회 2021 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.79 No.11
The use of plasma-enhanced chemical vapor deposition (PECVD) has drastically increased the development of 3D-NAND fabrication. We investigated a potential alternative method to replace the usage of NF3 in ACL deposition chamber cleaning with reasonable cleaning efficiency. Perfluoro-compounds (PFCs) have been listed as global warming gases, and NF3, which has 17,200 of 100 years GWP, is expected to be listed in a few years; thus, its usage for PECVD chamber cleaning in the semiconductor and display manufacturing industries may have restricted in the near future. To understand the plasma-cleaning phenomenon inside the PECVD chamber, we monitored the in situ plasma process using optical emission spectroscopy (OES) and quadrupole mass spectroscopy (QMS). The cleaning mechanism was revealed through the chemical species in the plasma using OES, and the presence of harmful gases in the exhaust stage was confirmed using QMS. O2, N2, and NH3 were selected as gases that could replace NF3, and the individual gases, as well as gas mixtures, were analyzed. A mixture of 20% N2 in O2 showed the highest film removal rate in ACL deposition chamber cleaning, and the gas with low GWP was released. Through this study, we propose an eco-friendly chamber cleaning method that can replace the existing method that causes global warming problems.
Human Security in Southeast Asia: 20 Years in Review
( Surin Pitsuwan ),( Mely Caballero-anthony ) 서울대학교 통일평화연구원 2014 Asian Journal of Peacebuilding Vol.2 No.2
The concept of human security gained prominence in Southeast Asia in the aftermath of the Asian financial crisis of 1997-1998. In a rapidly changing ASEAN, the list of human insecurities covers issues of both development and security, and fall within the ambit of both freedom from want and freedom from fear. But while human security has gained traction 20 years since the 1994 UNDP Human Development Report, more needs to be done to translate discourse into action. This article argues that in order to advance human security ASEAN states must be imbued with the political will to act decisively in addressing human insecurities and to work with other actors in promoting protection and empowerment of people and communities.
Current Status and Applications of Adaptive Laboratory Evolution in Industrial Microorganisms
( Surin Lee ),( Pil Kim ) 한국미생물 · 생명공학회 2020 Journal of microbiology and biotechnology Vol.30 No.6
Adaptive laboratory evolution (ALE) is an evolutionary engineering approach in artificial conditions that improves organisms through the imitation of natural evolution. Due to the development of multi-level omics technologies in recent decades, ALE can be performed for various purposes at the laboratory level. This review delineates the basics of the experimental design of ALE based on several ALE studies of industrial microbial strains and updates current strategies combined with progressed metabolic engineering, in silico modeling and automation to maximize the evolution efficiency. Moreover, the review sheds light on the applicability of ALE as a strain development approach that complies with non-recombinant preferences in various food industries. Overall, recent progress in the utilization of ALE for strain development leading to successful industrialization is discussed.
Surin, Prayoon,Wong on, Jessada,Eidhed, Krittee The International Promotion Agency of Culture Tech 2015 International Journal of Advanced Culture Technolo Vol.3 No.2
The purpose of this paper was to investigate the effects of solution treatment time and Sr-modification on the microstructure and property of the Al-Si piston alloy. It was found that as-cast microstructures of unmodified and Sr-modified Al-Si alloys consisted of a coarse acicular plate of eutectic Si, $Cu_3NiAl_6$ and $Mg_2Si$ phases in the ${\alpha}$-Al matrix but different in size and morphology. Both size and inter-particle spacing of Si particles were significantly changed by increasing of the solution treatment time. After a short solution treatment, the coarse acicular plate of the eutectic Si appears to be fragmented. Fully modified microstructure of Sr-modified alloy can reduce the solution treatment time to shorter compared to unmodified alloy. The maximum of a peak hardness value is found in the very short solution treatment of both Al-Si piston alloys. Compared to 10 h solution treatment, the solution treatment of 2-4 h is sufficient to achieve appropriate microstructures and hardness. The short solution treatment is very useful to increase the productivity and to reduce the manufacturing cost of the Al-Si piston alloys.
Surin Khomfoi,Warachart Sae-Kok,Issarachai Ngamroo 전력전자학회 2011 JOURNAL OF POWER ELECTRONICS Vol.11 No.6
An open circuit fault diagnostic method in IGBTs for the ac to dc converters used in microgrid applications is developed in this paper. An ac to dc converter is a key technology for microgrids in order to interface both distributed generation (DG) and renewable energy resources (RES). Also, highly reliable ac to dc converters are necessary to keep converters in continuous operation as long as possible during power switch fault conditions. Therefore, the proposed fault diagnostic method is developed to reduce the fault detection time and to avoid any other fault alarms because continuous operation is desired. The proposed diagnostic method is a combination of the absolute normalized dc current technique and the false alarm suppression algorithm to overcome the long fault detection time and fault alarm problems. The simulation and experimental results show that the developed fault diagnostic method can perform fault detection within about one cycle. The results illustrate that the reliability of an ac to dc converter interfaced with a microgrid can be improved by using the proposed fault diagnostic method.
Surin Plasen 대한미용의학회 2018 대한미용의학회지 Vol.2 No.2
Background: Subfascial endoscopic transaxillary breast augmentation were reported the benefits over the submuscular implant since 2000. Long term outcome was not reported in any large number of cases. Objective: To evaluate the long-term outcome in 3,004 cases over 10-year period. Methods: From 2007 to 2018, 3,004 cases were operated in our center. 2,949 cases undergo subfascial endoscopic transaxillary breast augmentation with textured round implant, 35 cases with smooth round gel, and 20 cases with textured anatomical implants. Inclusion criteria for patient selection is the pinch test in all patient group and this value is more than 1.5 inch. Post-operative follows up time from 2007 to 2018 with yearly visit with postoperative photograph. Postoperative complications were evaluated by the capsular contracture, abnormal chest muscle movement, rippling, infection, seroma, bottom out, hematoma, implant rotation and implant border palpation. Results: Early postoperative hematoma was found in 0.16% in textured round implant and was not found in smooth gel and anatomical textured implant. The rate of capsular contractor was 0.16% in textured round implant, 20.0% in smooth gel and 10.0% in anatomical textured implant. The rate of infection and seroma formation occurs 0.2% in textured round implant. The rate of rippling is 0.33% in textured round implant, 10.0% in anatomical textured implant and no rippling in smooth gel implant. Conclusion: Subfascial endoscopic transaxillary breast augmentation can be used in patients with thick breast tissues. Rippling and implant border palpation occurs frequently in textured round implant and textured anatomical implant. Capsular contracture is noticeably high in textured anatomical and smooth round implant. Careful selection of the patients is the key to success in this type of breast augmentation.
Surin Khomfoi 전력전자학회 2016 JOURNAL OF POWER ELECTRONICS Vol.16 No.1
A cascaded hybrid multilevel inverter including a reconfiguration technique for low voltage dc distribution applications is proposed in this paper. A PWM generation fault detection and reconfiguration paradigm after an inverter cell fault are developed by using only a single-chip controller. The proposed PWM technique is also modified to reduce switching losses. In addition, the proposed topology can reduce the number of required power switches compared to the conventional cascaded multilevel inverter. The proposed technique is validated by using a 3-kVA prototype. The switching losses of the proposed multilevel inverter are also investigated. The experimental results show that the proposed hybrid inverter can improve system efficiency, reliability and cost effectiveness. The efficiency of proposed system is 97.45% under the tested conditions. The proposed hybrid inverter topology is a promising method for low voltage dc distribution and can be applied for the multiple loads which are required in a data center or telecommunication building.