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Mo/Si Multilayer for EUV Lithography Applications
SeungYoonLee,HyungJoonKim,JinhoAhn,InYongKang,정용재 한국물리학회 2002 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.41 No.4
Extreme ultraviolet (EUV) re ective multilayers were deposited and characterized. Since control of the d-spacing is critical for higher re ectivity, an effective and accurate d-spacing measurement technology is required. Even though cross-sectional transmission electron microscopy (TEM) and low-angle X-ray diffraction (XRD) are standard methods in evaluating multilayers, they provide dierent d-spacing values from each other. Cross-sectional TEM images can give a direct measurement of the individual layer, but cannot describe the optical behavior of the multilayer. On the contrary, low-angle XRD analysis can provide an eective d-spacing, which includes the non-ideal factors. As a result, low-angle XRD can predict the EUV peak position more precisely than TEM analysis. Additionally, Ru/Mo/Si multilayers were deposited and characterized. These exhibit interfacial layer structures and re ectivities superior to those of Mo/Si multilayers.
Simulation of the Optical Anomaly in a Mo/Si Multilayer System for an EUV Reflector
InYongKang,YoungTaeLee,정용재,HyeongJoonKim,SungMinHur,SeungYoonLee,JinhoAhn,윤종승,ChangKyungKim 한국물리학회 2002 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.41 No.4
The performance of multilayer extreme ultraviolet (EUV) re ector has direct bearing on the process throughput and cost of new technology. Using 80 layers of a Mo/Si model and 120 layers of a Ru/Mo/Si model, we intended in this work to show that the re ectivity of the Bragg re ector can be improved by an optical anomaly based on a relative alteration of the layer thickness. As a result, by using the Mo/Si model with the thicknesses of the Mo layers increased equally and the Ru/Mo/Si model with the thicknesses of Ru layers increased equally, we obtained the maximum re ectivity enhancement eect. This quantitative analysis of the optical anomaly can be utilized to optimize the optical properties of the existing Mo/Si system as well as to provide fundamental insights into the science involved in a Bragg EUV reflector.
Surface morphology evolution of microcrystalline silicon p-layer prepared by RFPECVD
Seung-Yoon Lee,Seh-won Ahn,Heon-Min Lee 한국물리학회 2010 Current Applied Physics Vol.10 No.2
Surface morphology and crystallinity of silicon p-layer have been investigated on the effect of various deposition conditions of RFPECVD in order to clarify crystalline nuclei evolution. Crystallinity increased with increasing hydrogen dilution, but decreased with increasing both RF input power and diborane doping. Microcrystalline nuclei size increased with increasing working pressure, RF input power and substrate temperature. However, surface morphology was not correlated with crystallinity or deposition rate. A film with relatively large nuclei but having rather low crystallinity can be prepared for some condition,and vice versa. In order to get a dense microcrystalline silicon intrinsic layer subsequently deposited,surface morphology control of microcrystalline p-layer seems to be important as well as crystallinity.
( Seung Yoon Lee ),( Jung Kook Suh ),( Jin Hwa Choi ),( Woo Jae Jeon ),( Mi Ae Cheong ) 대한마취과학회 2010 Korean Journal of Anesthesiology Vol.59 No.3
Background: Reactive oxygen species (ROS) induce lipid peroxidation and tissue damage in endothelium. We studied the influences of ketorolac and diclofenac on ROS effects using the endothelium of rabbit abdominal aorta. Methods: Isolated rabbit aortic rings were suspended in an organ bath filled with Krebs-Henseleit (K-H) solution bubbled with 5% CO2 and 95% O2 at 37.5˚C. After being stimulated to contract with phenylephrine (PE, 10(-6) M), changes in arterial tension were recorded following the cumulative administration of acetylcholine (ACh, 3×10(-8) to 10(-6) M). The percentages of ACh-induced relaxation of aortic rings before and after exposure to ROS, generated by electrolysis of K-H solution, were used as the control and experimental values, respectively. The aortic rings were pretreated with ketorolac or diclofenac at the same concentrations (10(-5) M to 3×10(-4) M), and the effects of these agents were compared with the effects of ROS scavengers: catalase, mannitol, sodium salicylate and deferoxamine and the catalase inhibitor, 3-amino-1,2,4-triazole (3AT). Results: Both ketorolac and diclofenac maintained endothlium-dependent relaxation induced by ACh in a doserelated manner inspite of ROS attack (P<0.05 vs. control value). The 3AT pretreated ketorolac (3×10(-3) M) group was decreased more significantly than un-pretreated ketorolac (P<0.05). Conclusions: These findings suggest that ketorlac and diclofenac preserve the endothelium-dependent vasorelaxation against the attack of ROS, in a concentration-related manner. One of the endothelial protection mechanisms of ketorolac may be hydrogen peroxide scavenging. (Korean J Anesthesiol 2010; 59: 196-202)
Varification of Phase Defect Correctability of Nano - structured Multilayer for EUV Reflection
Seung Yoon Lee,Tae Geun Kim,Jinho Ahn 한국진공학회(ASCT) 2003 Applied Science and Convergence Technology Vol.12 No.S1
Ru interfacial layer was inserted into Mo-on-Si interface to enhance the extreme ultra-violet (EUV) reflective multilayer properties. The stacking status and optical properties are analyzed using cross-sectional transmission electron microscope (TEM), and reflectometer. About 1.5% of maximum reflectivity can be acquired as predicted in optical simulation, which is thought to be originated from the diffusion inhibition property. Phase defect correctability of the multilayer can be enhanced by the insertion of Ru barrier layer.
Oxygen-Controlled Seed Layer in DC Sputter-Deposited ZnO:Al Substrate for Si Thin-Film Solar Cells
Seung-Yoon Lee,Taehyun Hwang,Woojin Lee,Sangheon Lee,Hongsik Choi,Seh-Won Ahn,Heon-Min Lee,Byungwoo Park IEEE 2015 IEEE journal of photovoltaics Vol.5 No.2
<P>Oxygen-controlled seed layer in Al-doped ZnO (ZnO:Al) thin films deposited by the industrially compatible dynamic dc magnetron sputter results in both enhanced electron mobilities and appropriate etched morphologies for the Si thin-film solar cells. At the relatively low deposition temperature of 300 °C, optimized ZnO:Al film grown on the seed layer has the carrier mobility of 45 cm<SUP>2</SUP>/V·s and proper postetching morphology with around 1-2-μm crater size. Reduced angular distribution of the (002) grains analyzed by the diffraction rocking curve is shown as the key structural feature for the improved carrier mobility. Finally, the performance of the microcrystalline Si solar cell on the developed ZnO:Al substrate shows high-efficiency potential of the tandem solar cell adapting this transparent conductive oxide substrate.</P>
Nanostructural analysis of ZnO:Al thin films for carrier-transport mechanisms
Seung-Yoon Lee,Woojin Lee,남창우,Jongmin Kim,Sujin Byun,Taehyun Hwang,Byung-Kee Lee,Young Il Jang,Sungeun Lee,Heon Min Lee,박병우 한국물리학회 2013 Current Applied Physics Vol.13 No.4
The carrier mobility of sputter-deposited Al-doped ZnO transparent-conducting (ZnO:Al) thin films was controlled between 22 and 48 cm2/Vs by varying the ZnO:Al seed layer. The statistical distribution of the [001] grain misorientation was characterized from the X-ray diffraction rocking curve in the range from 0.043 (2.5) to 0.179 rad (10.2). The grain-boundary energy barriers (Eb) from Seto’s model [1] clearly exhibit linear dependence on the grain-boundary misorientation angle (u) according to the equation Eb ¼ 78 4 þ 173 32 u meV.
Enhancement of EUV Reflective Multilayer Properties by the Insertion of Ru Barrier Layer
Seung Yoon Lee,Jinho Ahn,Tae Geun Kim 한국물리학회 2003 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.43 No.51
Ru interfacial layer was inserted into a Mo-on-Si interface to enhance the extreme ultraviolet (EUV) re ective multilayer properties. The stacking status and the optical properties were analyzed using cross-sectional transmission electron microscopy (TEM), X-ray diraction (XRD), and a re ectometer. About 1.5 % improvement of the maximum reflectivity can be acquired as predicted by an optical simulation, which is thought to originate from the diffusion-inhibition property.
Invasive Squamous Cell Carcinoma of the Oral Mucosa Associated with HPV Type 53
( Seung Yoon Lee ),( Chung Eui You ),( Mi Youn Park ),( Hae Sun Yun ),( Sung Soon Kim ) 대한피부과학회 2007 Annals of Dermatology Vol.19 No.1
A 77-year old man presented with a fungating mass on the oral mucosa and lip, which had an irregular margin. An incisional biopsy of the mass revealed an invasive squamous cell carcinoma. PCR analysis detected HPV DNA in the biopsy specimen. The HPV type was determined as HPV-53 by direct cycle sequencing. This is the first report of HPV-53 in an oral malignant tumor. (Ann Dermatol (Seoul) 19(1) 19~21, 2007)