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Crystallization of a-Si Films with Smooth Surfaces by Using Blue Multi-Laser Diode Annealing
Tatsuya Okada,Kouya Sugihara,Satoshi Chinen,Takashi Noguchi 한국물리학회 2015 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.66 No.8
Crystallization of ∼50-nm-thick amorphous Si (a-Si) with a smooth surface was achieved by using Blue Multi-Laser Diode Annealing (BLDA). The a-Si films were deposited by using RF sputtering with Ne gas or by using plasma enhanced chemical vapor deposition (PE-CVD) and were annealed by using BLDA with CW scanning. After the films had been annealed a relatively low laser power below 4 W, the root-mean-square (RMS) roughness deduced from the atomic force microscopy (AFM) results for the surfaces of the Si films was slightly increased, but smoothness was within 3 nm despite the conditions under which the films had been crystallized. BLDA has a potential to realize next-generation poly-Si thin film transistors (TFTs).