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3차원 LIGA 미세구조물 제작을 위한 마이크로 액추에이터 내장형 X-선 마스크
이광철,이승섭,Lee, Kwang-Cheol,Lee, Seung-S. 대한기계학회 2002 大韓機械學會論文集A Vol.26 No.10
We present a novel method for 3D microfabrication with LIGA process that utilizes a deep X-ray mask in which a micro-actuator is integrated. The integrated micro-actuator oscillates the X-ray absorber, which is formed on the shuttle mass of the micro-actuator, during X-ray exposures to modify the absorbed dose profile in X-ray resist, typically PMMA. 3D PMMA microstructures according to the modulated dose contour are revealed after GG development. An X-ray mask with integrated comb drive actuator is fabricated using deep reactive ion etching, absorber electroplating, and bulk micromachining with silicon-on-insulator (SOI) wafer. 1mm $\times$ 1 mm, 20 $\mu$m thick silicon shuttle mass as a mask blank is supported by four 1 mm long suspension beams and is driven by the comb electrodes. A 10 $\mu$m thick, 50 $\mu$m line and spaced gold absorber pattern is electroplated on the shuttle mass before the release step. The fundamental frequency and amplitude are around 3.6 kHz and 20 $\mu$m, respectively, for a do bias of 100 V and an ac bias of 20 $V_{p-p}$ (peak-peak). Fabricated PMMA microstructure shows 15.4 $\mu$m deep, S-shaped cross section in the case of 1.6 kJ $cm^{-3}$ surface dose and GG development at 35$^{\circ}C$ for 40 minutes.
배기계 Hanger 위치 결정 및 Bellows효과에 관한 연구
이승섭(S.S.Lee),이장명(C.M.Lee) 한국자동차공학회 1993 한국자동차공학회 춘 추계 학술대회 논문집 Vol.- No.-
The hanger posi tions of the exhaust system can be determined to minimize the energy transferred into a body by the normal mode analysis of the total exhaust system using the Finite Element Method.<br/> During this procedure, the bellows effect is also studied using the forced vibration analysis. In this article, these analyses are performed below 200 Hz, equivalent 6000 rpD based on the 2nd order component of a four cylinder engine.<br/>
브리지 및 원형 금 박막의 기계적 물성 및 계면파괴인성치 측정
최우성(W.S. Choi),최승태(S.T. Choi),손상욱(S.U. Son),이승섭(S.S. Lee),양세영(S.Y. Yang),엄윤용(Y.Y. Earmme) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
In order to measure the mechanical properties of gold films on Si substrate, two types of specimens, i.e., bridged films and circular membranes, are manufactured. Using the wedge tip, the bridged films are indented so that the bridged gold films are pushed off, which is called as V-peel test. The load-deflection curves obtained by the V-peel tests are analyzed with the concept of geometrically nonlinear beam by using the minimum potential energy theory together with Ritz method. Young’s modulus and residual stress of the bridged gold films are obtained. Blister test is also conducted to measure the Young’s modulus and residual stress of the circular membrane specimens, of which deformation is measured by Twyman-green interferometer. By gradually increasing the applied pressure in the blister test, the interfacial fracture toughness between the gold film and Si substrate is measured.
표면처리된 탄소 마이크로니들을 이용한 초소수성 표면 제조
이정아(Jung A Lee),이석우(Seok Woo Lee),이승섭(Seung S. Lee),박세일(Se Il Park),이광철(Kwang-Cheol Lee) 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.11
This paper reports a fabrication method of high aspect ratio (HAR) carbon microneedle arrays with controlled geometry and a creation of a superhydrophobic surface utilizing HMDS (hexamethyldisilazane)-modified carbon microneedles. Carbon microneedles are obtained through lithography and thermal treatment, which have aspect ratios greater than ten and nanoscale tips by volume shrinkage during pyrolysis of the fabricated SU-8 microneedles. We also stuied the wetting property of carbon microneedle arrays with different base diameters and spacing between needles and created an extremely water-repellent surface using HMDS-treated carbon microneedles. The proposed surface will be of great interest in self-cleaning, low-drag microfluidics, and lab-on-a-chip.