Mo/SiO₂/Si(100)기판 위에 MOCVD법으로 성장시킨 AIN박막이용 GHz대역의 FBAR제작에 관한 연구

양충모,김성권,차재상,박구만,Yang, Chung-Mo,Kim, Seong-Kweon,Cha, Jae-Sang,Park, Ku-Man 한국조명전기설비학회 2006 조명·전기설비학회논문지 Vol.20 No.4

본 논문에서는 $Mo/SiO_2/Si(100)$ 기판 위에 MOCVD(Metal-Organic-Chemical-Vapor Deposition)법을 이용하여 C축 방향으로 성장시킨 AIN(Aluminum Nitride) 박막을 이용하여 GHz대역 무선 통신에서 사용할 수 있는 FBAR(Film-Bulk-Acoustic Resonator)을 제작하였다. 제작된 공진부의 공진주파수와 반공진주파수는 각각 3.189[GHz]와 3.224[GHz]으로 측정되었으며, Q값(Quality Factor)과 유효한 전기기계 결합계수(${k_{eff}}^2$)는 각각 24.7과 2.65[%]로 평가되었다. AIN의 증착(Deposition) 조건은 $950[^{\circ}C]$의 기판표면(Substrate) 온도, 20Torr의 압력, 25000의 N/Al의 V/III비로 증착하였다. $4{\times}10^{-5}[\Omega{cm}]$의 Mo 하부전극 고유저항과 $Mo/SiO_2/Si(100)$ 기판 위에 AIN(0002) FWHM(Full-Width at Half-Maximum) 4를 갖는 C축 방향성의 AIN 박막을 성공적으로 성장시켰다. 따라서 증착된 AIN박막의 FWHM값은 GHz대역 무선 통신용 RF(Radio Frequency) 밴드 패스 필터 설계에 유용하게 사용될 것이다. In this paper, it is reported that film-bulk-acoustic resonator with high c-axis oriented AIN film on $Mo/SiO_2/Si(100)$ using metal-organic-chemical-vapor deposition was fabricated. The resonant frequency and anti-resonant frequency of the fabricated resonator were observed with 3.189[GHz] and 3.224[GHz], respectively. The quality factor and the effective electromechanical coupling coefficient(${k_{eff}}^2$) were measured with 24.7 and 2.65[%], respectively. The conditions of AIN deposition were substrate temperature of $950[^{\circ}C]$, pressure of 20Torr, and V-III ratio of 25000. A high c-axis oriented AIN film with $4{\times}10^{-5}[\Omega{cm}]$ resistivity of Mo bottom electrode and $4[^{\circ}]$ of AIN(0002) full-width at half-maximum(FWHM) on $Mo/SiO_2/Si(100)$ was grown successfully. The FWHM value of deposited AIN film is useful for the RF band pass filter specification for GHz-band wireless local area network.

커뮤니티공간으로서의 어린이공원 조성에 관한 연구

김연금,김성주,박환지,유다희,최성용,홍승모,Kim, Yun-Geum,Kim, Seong-Joo,Park, Hwan-Ji,Yu, Da-Hee,Choi, Sung-Young,Hong, Seung-Mo 한국조경학회 2008 韓國造景學會誌 Vol.35 No.6

This study deals with the participatory design process of renovating a children's park. The process should proceed with two major elements. Firstly, the children's park should be designed from the perspective of children. Secondly, it should be designed in consideration of the context of the community. This study is divided into two parts. First is the review of theory concerning the meaning and roles of the children's park as a community space, the importance of children's participation in the design and the participatory method of the children. The second is the case study. The site for the case study is Ssial Park in Nowon-Gu, Seoul. The entire process of the case study is with community participation, from identifying the park's problems to the actual construction. At every step, through the participatory programs, the community participates in the decision making. In addition, mutual understanding among participants is pursued through diverse means of communication. The following results of the case study were found. Firstly, diverse participatory programs and the active trial to enable the community to communicate contribute to the sense of ownership and responsibility concerning the park Secondly, the community can negotiate the differences in opinions without needing the help of experts. Of course, there are limits in the case study, such as the fact that the community organization, which is the core of communication and maintenance concerning the park, is not organized through the process of a case study. Another is that more diverse methods, which inform all community members of the participatory process, should have been used.

차세대 고속철도 특수교량의 설계 및 기술사양 조사

박만호(Park Man-Ho),문제우(Mun Je-U),김성일(Kim Sung-Il),홍성모(Hong Seong-Mo),김종태(Kim Jong-Tae) 한국철도학회 2008 한국철도학회 학술발표대회논문집 Vol.- No.-

Mo-Am arch bridge is only the long-span bridge (with 125m span) in the Kyong-Bu high-speed line in service, while other bridges are PSC box girder bridges and steel composite bridges with span lengths of 25~50m. However, in foreign high-speed lines, special cable-supported bridges like cable-stayed bridges and extradosed bridges are being adopted in earnest with technical specifications. The cable supported bridge is recognized as one of the indices of technology in civil engineering field, and thus it is being adpoted with a sense of rivalry in countries with advanced technology in railway engineering. In this paper, to apply the top-level cable-supported bridge technology to the domestic high-speed line up to 400㎞/h by establishing the technical specifications on cable-supported bridges including span length, the requirements for securing the dynamic stability and running safety of high speed train are analyzed through case studies for domestic and foreign cases.

한의 진단의 추론 형식과 실재성

박경모,최승훈,안규석 현곡학회 1997 제3의학 Vol.2 No.1

소아에서 나타난 비구개관낭의 치험례

모정희,정현구,조태식,김효석,박성규,이난영 조선대학교 구강생물학연구소 2002 口腔生物學硏究 Vol.26 No.2

The nasopalatine duct cyst is the most common non-odontogenic cyst in the oral area and is thought to be originated from the epithelial remnants of the nasopalatine duct. The nasopalatine duct cyst have been mentioned to be an overall incidence of 1.7-11.9% of all jaw cyst. More males than females are affected by that. It could occur all around the age, and especially in their 40th and 60th it happens the most and in childhood it is very rare. Proper treatment for nasopalatine duct cyst is enucleation. In the case of very large cysts, it is likely to be a risk of naso-oral or antral-oral fistulas or of devitalization of teeth, marsupialization is indicated. The purpose of case report is that a nasopalatine duct cyst in is very rare in childhood. A 9-year-old boy was referred to the chosun university pedodontics clinic that this child who has anterior palatal swelling is in routine check. The size of the cyst was so big that the marsupialization was committed and obturator was put. This patient is on the continuous observation. we treated the nasopalatine duct cyst with obturator.

IDL 컴파일러에서 스터브 코드의 최적화

박찬모,홍성표,이정기,이준 조선대학교 에너지.자원신기술연구소 1999 에너지·자원신기술연구소 논문지 Vol.21 No.2

The programmer in the distributed environment is often faced with problems when writes a communication code. One is written the codes by hand and the other is by CORBA IDL compiler. When the programmer writes the code by hand then the speed of the program may be increased, but the human effort required to implement and maintain is greatly increased. If the code is generated using a CORBA IDL compiler then programmer effort will be reduced, but the performance of the Application program may be poor. In this paper, we suggests the way that the stub code is maintain the enough free space before marshaling the data into message buffer. This methods were increased the performance of Application program and solved the problems that optimizing of code.

地域開發學科의 敎科課程에 관한 硏究

河晟奎,朴西浩,宋仁城,金英模 檀國大學校 地域硏究所 1986 地域硏究 Vol.7 No.-

요통의 병태생리

이환모,문성환,박문수 大韓痛症學會 1997 The Korean Journal of Pain Vol.10 No.-

치관보철용 글라스 세라믹 재료에서 조성비 변화에 따른 기계적 특성에 관한 연구

정인성,김형일,박성수,최경남,안진모,박희찬 대한치과기재학회 1999 대한치과재료학회지 Vol.26 No.1

Glass ceramics for dental crown prosthesis were prepared by heat-treatment of CaO-MaO-SiO₂-P₂O -TiO₂glasses. The crystallization behaviors of samples have been investigated as a function of heat-treated temperature, holding time and chemical composition with their mechanical properties. From the experiment, the following results were obtained: The nucleation rate of apatite increased with increasing CaO or P₂O and decreasing MgO or TiO₂. Vickers hardness and bending strength of samples increased with increasing MgO or TiO₂ and decreasing CaO or P₂O. Vickers hardness of samples increased due to the precipitation of apatite, whitlockite, β-wollastonite, magnesium titanate, and diopside crystal phases within glass matrix. The final crystalline phase assemblages and the microstructures of the samples were found to be dependent on glass compositions, heat-treatment temperature, and holding time.

SystemC를 이용한 RISC 코어 구현에 관한 연구

최홍미,정갑천,박성모 전남대학교 전자통신기술연구소 2002 전자통신기술논문지 Vol.5 No.1

As techniques for progressing semiconductor have developed SOC(System-on-Chip) which has capacity of concentration a huge and complex system into a chip has recently drawn a great deal of attention. Therefore, creating a new alternative to traditional methods in system designing becomes necessary. The design environment on the basis of C/C ++is programmed to surmount the liabilities such as timing, clock, delay, parallel processing or reactive movements, etc, which the previous language could not properly describe. The present study investigates the design environments on the level of system and also describes core model of algorithm, function, and resister transmission levels, expecially attentive to the embodiment of RISC core. SystemC was used for the purpose of proving its effectiveness in the new design environment.