Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth

Jang, Yunchang,Roh, Hyun-Joon,Park, Seolhye,Jeong, Sangmin,Ryu, Sanywon,Kwon, Ji-Won,Kim, Nam-Kyun,Kim, Gon-Ho Elsevier 2019 Current Applied Physics Vol.19 No.10

<P><B>Abstract</B></P> <P>A phenomenology-based virtual metrology (VM) for monitoring SiO<SUB>2</SUB> etching depth was proposed by Park (2015). It achieved high prediction accuracy by introducing newly developed plasma information (PI) variables as designated inputs, called PI-VM. The PI variables represent the state of the plasma, the sheath, and the target during the process. We investigate how a PI variable can help to improve prediction accuracy of VM and how it plays a special role in the statistical selection. We choose only PI<SUB>EEDF</SUB> among the three PI variables to focus on the investigation. The PI<SUB>EEDF</SUB> is determined from the ratio of line-intensities of optical emission spectroscopy. We apply Pearson's correlation filter (PCF), principal component analysis (PCA), and stepwise variable selection (SVS) as statistical selection methods on the variables set including PI<SUB>EEDF</SUB> or not. Multilinear regression is used to model the VM. This study reveals that PI<SUB>EEDF</SUB> variable is a good variable in terms of independence from other input variables and explanatory power for an output variable. Especially, VM using SVS method applied to variable sets including PI<SUB>EEDF</SUB> achieves the highest accuracy, comparable to Park's PI-VM. This study shows that PI<SUB>EEDF</SUB> variable is particularly useful for monitoring of the fine variations in semiconductor manufacturing process and it also extends the utilization of OES sensor data.</P>

NSIP와 BOOP의 고해상전산화단층촬영 소견과 비교

백상현,박재성,차장규,홍현숙,김대호,박성진,조준희,이혜경,최진수 순천향의학연구소 2003 Journal of Soonchunhyang Medical Science Vol.9 No.2

Purpose: BOOP and NSIP also share similar clinical features such as subacute flu-like illness, the finding of bronchoalveolar lavage, the result of pulmonary function test and more favourable outcome than usual interstitial pneumonia(UIP). The author try to compare the HRCT findings of NSIP with BOOP by pattern and distribution of diseases. Materials and Methods: HRCT findings of histopathologically proven NSIP(Group Ⅰ; 6, Group Ⅱ; 7, Group Ⅲ; 2) in 15 patients(5 male, 10 female, age range, 39-69 years; mean age, 53 years), BOOP in 15 patients(6 male, 9 female, age range, 26-76 years; mean age, 52 years) were reviewed retrospectively. Results: The common pattern of the two diseases was admixed consolidation, ground glass attenuation & reticular densities with/without architectural distortion(NSIP; 53.3%, BOOP; 46.7%). The main component of the pattern wan predominantly consolidation(NSIP; 46.7%, BOOP; 73.3%) and ground glass attenuation(NSIP; 40.0%, BOOP;20.0%). Architectural distotion was more provinent finding with NSIP(mild ; 3, moderate ; 4, severe; 2) compared with BOOP(mild; 7, moderate; 2, severe; 0). The predominant overall distribution was lower lung, peribronchovascular & peripheral lung field in both of the two entities(NSIP;73.3%, BOOP; 73.3%). Peribronchovascular involvement was more common with NSIP(100%) than BOOP(80%), whereas peripheral involvement was more common with BOOP(93.3%) than NSIP(80%). Conclusion: The HRCT findings of NSIP and BOOP were similar in pattern and distribution. But NIP manifested more frequently ground-glass attenuation, whereas BOOP showed more frequently consolidation. Architectural distortion was more severe with NSIP than BOOP. NSIP invoved more frequently peribronchovascular space and BOOP were more common in peripheral lung field.

40세 이하 관상동맥 질환자에서 장기적 임상 관찰

이승욱,정명호,박종철,박형욱,조상희,김원,김계훈,이상현,강경태,조장현,김남호,김건형,안영근,조정관,박종춘,강정채 全南大醫大 2001 전남의대학술지 Vol.37 No.2

지능형 자동차 주변 감시 시스템 설계 방안

장시웅(Si-woong Jang),박영식(Young-sik Park),성현용(Hyun-yong Sung),곽길봉(Gil-bong Kwak),김선남(Seon-nam Kim),김경진(Kyeoung-jin Kim) 한국정보기술학회 2009 Proceedings of KIIT Conference Vol.2009 No.-

본 연구는 차량 주변을 지능적으로 감시하는 자동차 주변 감시시스템에 관한 것으로, 자동차의 주행 및 주차 시 속도의 변화나 운전자의 요청에 의해 자동차 주변 지역에 관한 시야를 상황에 따라 달리하여 모니터링 함으로써 운전자가 안전한 주행 및 주차를 수행할 수 있게 하기 위한 것이다. 그러한 목적을 달성하기 위하여 본 연구에서는 차량의 주변부를 감시하기 위하여 차량의 외곽에 설치된 카메라의 각도가 지면으로부터 차량의 상부를 향하는 방향으로 변경될 수 있도록 제어하는 제어부, 카메라의 영상을 입력받아 차량주변의 영상을 생성하는 영상처리모듈, 영상처리모듈에서 생성된 영상을 출력하는 디스플레이를 포함하는 것을 특징으로 하는 지능형 자동차 주변 감시시스템을 제안한다. This study is on a vehicle surroundings monitoring system, which enables a driver to travel and park safely by monitoring vehicle surroundings, depending on the speed of vehicle and driver's control when traveling and parking. To achieve the aforementioned purpose, we propose an intelligent vehicle surroundings monitoring system, which consists of a control part, an image processing module and display module. Hence, the control module controls angle of camera to turn upward from the bottom to monitor vehicle surroundings. The image processing module merges the received images from cameras with the original vehicle image to display the vehicle’s surroundings in real time as if looking down from the sky.

개에서 이중 결찰법을 통한 동맥관 개존증의 완치 예

윤헌영,정순욱,박희명,박철,정만복,김준영,한현정,황민,노병국,박상혁,장하영,박정윤 한국임상수의학회 2004 한국임상수의학회지 Vol.21 No.1

A ten months old, female Yorkshire terrier weighing 2.88 kg referred to veterinary teaching hospital of college of veterinary medicine, Konkuk University because of syncope, cough and dyspnea. First hematological and serum chemical test revealed thrombocytopenia, mild anemia, and increase of concentration of ALP (195 U/L). On 57 days later, second hematological and serum chemical test revealed polycythemia, increase of concentration of ALP (211 U/L), and Tchol (387 mg/dl). Right atrium enlargement, main pulmonary artery bulge and cardiomegaly (VHS = 11.5) were observed in radiographic findings. Ultrasonographic images showed both right and left ventricular dilation and turbulent flow between the descending aorta and the main pulmonary artery in color Doppler imaging. ECG showed left ventricular enlargement, SA block, and electrical alternant. Thoracotomy was performed through left fourth intercostal incision under isoflurane anesthesia. Patent ductus arteriosus was double ligated with 1-0 silk. Cough and dyspnea disappeared on 5 days after operation. Turbulent flow was not found in color doppler imaging of ultrasonography on 10 days after operation. Ten months later after the operation, syncope could not exist any more.

한의진단명과 진단요건의 표준화 연구 II (표준화 실례) : 2차년도 연구결과 중간 보고

양기상,최선미,최승훈,안규석,박경모,박종현,김성우,신승호,정우열,전병훈,고현,김정범,신상우,김성훈,김동희,권영규,엄현섭,장혜옥 한국한의학연구원 1996 한국한의학연구원논문집 Vol.2 No.1

The diagnostic requirements were suggested and explained regarding the systems of differentiation of symptoms and signs in the second year study of standardization and unification of the terms and conditions used for diagnosis in oriental medicine. The systems were as follows; - differential diagnosis according to condition of body fluid, differentiation of syndromes according to the state of qi and blood, differential diagnosis according to relative excessiveness or deficiency of yin and yang(氣血陰陽津液辨證) - differentiation of diseases according to pathological changes of the viscera and their interrelation - analyzing and differentiating of febrile diseases in accordance with the theory of the six channels(傷寒辨證) The individual diagnosis pattern was arranged by the diagnostic requirements in the following order : another name(異名), notion of diagnosis pattern, index of differentiation of symptoms and signs(辨證指標), the main point of diagnosis, analysis of diagnosis pattern(證候分析), discrimination of diagnosis pattern(證候鑑別), a way of curing a diseases(治法), prescription(處方), herb in common use(常用藥物), diseases appearing the diagnosis pattern(常見疾病), documents(文獻調査). This study was carried out on the basis of the Chinese documents and references.

원광 뇌졸중 등록 자료를 통한 허혈성 뇌졸중의 임상 양상과 위험인자

박현영,장혁,박성욱,김요식,조광호 圓光大學校 醫科學硏究所 1999 圓光醫科學 Vol.15 No.2

Background: To investigate clinical features and risk factors of stroke patients who lived in Korean rural area, we analysis Wonkwang Stroke Registry and compared with other studies. Methods: We filled out Stroke Registry in the consecutive patients with acute ischemic stroke from march 1997 to February 1999. We analyzed demographic data, risk factors and subtypes of stroke. All patients were divied into 3 groups according to their age. Stroke subtype was classified into large artery atherosclerosis(LAA),small vessel occlusion(SVO), cardioembolism(CE), stroke of other determined etiology(SOE), and stroke of undetermined etiology(SUE) by TOAST(Trial of Org 10172 in Actue Stroke Treatment). Results: Five hundred nine patients were included in Wonkwang Stroke Registry from march 1997 to February 1999. Mean age was 65.47±0.48 years old. The ratio of males to females was 1 : 0.78. SVO was the most frequent subtype(49%) of ischemic stroke, and then followed by LAA(27.5%), CE(7%), SOE(8.1%), and SUE(8.4%). The internal carotid artery(ICA) territory was involved in 59.3% patients. Vertebrobasilar artery territory involvement was noted in 37.5%, and 3.2% of patients showed multiple artery territory involvement. All patients had risk factor of ischemic stroke except for 14 patients. Mean number of risk factors was 1.7/patient. Hypertension(62.1%) was the most frequent risk factor, and follwed by smoking(26.3%), diabetes mellitus(25.9%), and hyperlipidemia(25.55%). Conclusions: These results showed that the proportion of ischemic stroke subtype was not concordant with other studies. It may be caused by different mode of living and ethnic difference. This study may afford further information on the characteristics of Korean rural area stroke.

석면함유 슬레이트 지붕 물받이 퇴적물 중 석면 섬유 함유율

임지현,한솔민,김현석,신유민,박시은,허정윤,김민영,장봉기 순천향대학교 기초과학연구소 2022 순천향자연과학연구 논문집 Vol.28 No.1,2

This study attempted to determine the degree of asbestos release from the aging slate roof by comparing the asbestos content in the slate roof rain gutter with a colored steel plate (tin plate) over the slate roof. Four slate roof houses located in Haengmok-ri, Asan-si, Chungcheongnam-do, and one house constructed with a colored steel plate on the slate roof were selected to collect the sediment of the roof rain gutter. The asbestos fiber content was calculated by a point counting method using a polarization microscope after pretreatment with conversion treatment and hydrochloric acid treatment. The average asbestos content of the four slate roof rain gutter were 1.89%. However, asbestos was not detected in the Slate covering roof rain gutter, which were constructed on the slate roof. Asbestos fiber content was the highest at 2.89% in the slate roof rain gutter installed in 1976, followed by 2.44% in 1953. From the above results, it is necessary to minimize secondary damage as asbestos fibers released from slate roof houses to the surrounding atmosphere or leaked from slate roofs as rainwater may cause soil pollution and seriously affect residents' health. Although covering with colored steel plates (tin plates) has been shown to prevent the leakage of asbestos fibers to some extent, it is believed that a policy alternative to remove the slate roof as soon as possible is needed to solve the fundamental problem.

광전자 집적회로(OEIC)용 Bi 도핑된 광학박막의 비가역 특성연구

박현식,박장환 안성산업대학교 1997 論文集 Vol.29 No.1

This study was carried out to estimate non-reciprocity of Bi doped Optical Film for Opto Electronic Integrated Circuit. Bi doped optical film was made by epitaxy process under suitable supercooling condition. Rotation of polarization plane was mesured at wavelength 1550 nm with varing magnetic field strength. Rotation of polarization plane was measured to be - 30 degree at wavelength 1550nm. It is found that Bi doped optical film has large rotation of polarization plane for input laser beam. As magnetic field increased, rotation of polarization plane were increased till saturation. Thus Bi doped Optical film have been shown the possibility for non-reciprocity device for Opto Electronic Integrated Circuit.

LED를 이용한 복합레진의 광조사시, 중합수축의 속도와 양, 미세경도에 관한 연구

박성호,김수선,조용식,이순영,김도현,장용주,문현승,서정원,노병덕 大韓齒科保存學會 2003 Restorative Dentistry & Endodontics Vol.28 No.4

This study evaluated the effectiveness of the light emitting diode(LED) units for composite curing. To compare its effectiveness with conventional quartz tungsten halogen (QTH) light curing unit, the microhardness of 2mm composite, Z250, which had been light cured by the LEDs (Ultralume LED2, FreeLight, Developing product D1) or QTH (XL 3000) were compared on the upper and lower surface. One way ANOVA with Tukey and Paired t-test was used at 95% levels of confidence. In addition, the amount of linear polymerization shrinkage was compared between composites which were light cured by QTH or LEDs using a custom-made linimeter in 10s and 60s of light curing, and the amount of linear polymerization shrinkage was compared by one way ANOVA with Tukey. The amount of polymerization shrinkage at 10s was XL3000 > Ultralume 2, 40, 60 > FreeLight, D1 (P<0.05) The amount of polymerization shrinkage at 60s was XL3000 > Ultralume 2, 60 > Ultralume 2, 40 > FreeLight, D1 (P<0.05) The microhardness on the upper and lower surface was as follows; <본문 참조> It was concluded that the LEDs produced lower polymerization shrinkage in 10s and 60s compared with QTH unit. In addition, the microhardness of samples which had been cured with LEDs was lower on the lower surfaces than the upper surfaces whereas there was no difference in QTH cured samples.