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Phase Modulation Homodyne Interferometer with a 10-pm Resolution Using a Tunable Laser Diode
Masashi Ishige,Fumio Matsuura,Masaaki Kawasugi,Masato Aketagawa 한국정밀공학회 2007 International Journal of Precision Engineering and Vol.8 No.2
We propose a new displacement measurement method using a phase modulation homodyne interferometer and a tunable laser diode as a light source to determine an arbitrary length with a resolution in the order of 10 pm. In the proposed instrument, the displacement of a movable mirror in the interferometer can be converted to a frequency shift of the tunable laser diode. We discuss the principles of the proposed method, the instrumentation, and the experimental results, and compare the proposed method with two commercial displacement sensors. The commercial sensors used are a heterodyne interferometer, the interpolation error of which is also measured, and a capacitive sensor.
Phase Modulation Homodyne Interferometer with a 10-pm Resolution Using a Tunable Laser Diode
Ishige, Masashi,Matsuura, Fumio,Kawasugi, Masaaki,Aketagawa, Masato Korean Society for Precision Engineering 2007 International Journal of Precision Engineering and Vol.8 No.2
We propose a new displacement measurement method using a phase modulation homodyne interferometer and a tunable laser diode as a light source to determine an arbitrary length with a resolution in the order of 10 pm. In the proposed instrument, the displacement of a movable mirror in the interferometer can be converted to a frequency shift of the tunable laser diode. We discuss the principles of the proposed method, the instrumentation, and the experimental results, and compare the proposed method with two commercial displacement sensors. The commercial sensors used are a heterodyne interferometer, the interpolation error of which is also measured, and a capacitive sensor.