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SiC nanowires formed by high energy ion beam irradiation to polymer films and heating
Satoshi Tsukuda,Shu Seki,Masaki Sugimoto,Seiichi Tagawa,Shun-Ichiro Tanaka 한양대학교 세라믹연구소 2008 Journal of Ceramic Processing Research Vol.9 No.5
Ion bombardment can release densely active intermediates within a cylindrical area along the passage of a single ion. The cylindrical area, in which high-energy is deposited from projectile ion, is sometimes called an “ion track”. The high energy charged particle irradiation of a polycarbosilane (PCS) film causes cross-linking reactions, leading to the formation of a polymer gel containing cylindrical nanostructures (nanowires). The diameter and length of the nanowires were completely controlled by changing several parameters. PCS is also a well-known a precursor of silicon carbide (SiC), and the PCS nanowires formed by the present techniques were heated at 1,000 oC in Ar gas. A SiC ceramic wire, which has a higher heat resistance than polymers, was obtained on a Si substrate by conversion from the PCS nanowires. In this paper, the crystal structure and phase of the SiC nanowires obtained are discussed. Ion bombardment can release densely active intermediates within a cylindrical area along the passage of a single ion. The cylindrical area, in which high-energy is deposited from projectile ion, is sometimes called an “ion track”. The high energy charged particle irradiation of a polycarbosilane (PCS) film causes cross-linking reactions, leading to the formation of a polymer gel containing cylindrical nanostructures (nanowires). The diameter and length of the nanowires were completely controlled by changing several parameters. PCS is also a well-known a precursor of silicon carbide (SiC), and the PCS nanowires formed by the present techniques were heated at 1,000 oC in Ar gas. A SiC ceramic wire, which has a higher heat resistance than polymers, was obtained on a Si substrate by conversion from the PCS nanowires. In this paper, the crystal structure and phase of the SiC nanowires obtained are discussed.