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Investigation of New Ionized Cluster Beam Source
고석근(S.K. Koh),장홍규(H.G. Jang),정형진(H-J. Jung),최원국(W.K. Choi),S.G. Kondranine,E.A. Kralkina 한국진공학회(ASCT) 1996 Applied Science and Convergence Technology Vol.5 No.3
본 논문은 새로운 이온화된 클라스터 빔원(ionized cluster beam source)의 제작과 특성조사에 관한 것이다. 이온화된 클라스터 빔원의 특성은 도가니부와 이온화부가 하나의 원통안에 놓여있지만, 전기적으로는 서로 분리되어 있지 않다. 이온화 효율을 증대시키기 위하여 영구자석을 배치하였다. 인출할 수 있는 Cu^+ 이온의 최대 전류밀도는 1.5 ㎂/㎠ 이었으며, 증착율이 초당 0.4Å일 때 이온화율은 3% 이었으며, 증착율이 초당 0.2Å일 때는 이온화율이 6% 이었다. 증착율이 초당 0.2Å이고, 가속전압이 4㎸에서 Cu^+ 이온빔의 균일성이 95% 이상이었다. The present paper represents the results of development and first experimental tests of a new ionized cluster beam (ICB) source. The novelty of ICB source lies in the fact that the crucible and ionization parts are spaced in one cylindrical shell but are not divided in an electric circuit. The ICB source adapts permanent magnets to increase the ionization efficiency. The maximum obtained Cu^+ ion current density is 1.5㎂/㎠, therewith the ionization rate amounts 3% under deposition rate equal to 0.4Å/s, and amounts 6% at the denposition rate, equal to 0.2Å/s. When the deposition rate is 0.2Å/s and the acceleration voltage is 4㎸, the Cu^+ion beam uniformity is better than 95%.
Development and Test of Ion Source with Small Orifice Cold Cathode
G. E. Bugrov,S. K. Kondranin,E. A. Kralkina,V. B. Pavlov,K. V. Vavilin,Heon-Ju Lee 한국진공학회(ASCT) 2001 Journal of Korean Vacuum Science & Technology Vol.5 No.1
The paper represents the results of the development and the test of “cold cathode” ion source model with 5 ㎝ aperture where the glow discharge is utilized for generation of electrons in the cathode of the ion source. The results of probe measurements of the ion source are represented. The integral parameters such as electron energy distribution function(EEDF), electron density and mean electron energy, discharge voltage-current characteristics, and distribution of ion beam were studied.
Optimisation of cold cathode ion source model
G.E.Bugrov,S.K.Kondranin,E.A.Kralkina,V.B.Pavlov,D.V.Savinov,K.V.Vavilin,Heon-JuLee 한국물리학회 2003 Current Applied Physics Vol.3 No.6
This paper represents the results of the optimisation of cold cathode ion source model with 5 cm extraction aperture diameter. Inthis model, the glow discharge is utilised for generation of electrons in the cathode of the ion source. The various models withdierent lengths of cathode and anode are tested. The shortest model with 4.5 cm in length of cathode and anode each showssatisfactory operation and can be used in cases when the high values of extracted ion current are not required. The best model fromthe point of view of ion beam current value and eciency of the discharge is the model with cathode length of 7 cm and anode lengthof 7 cm. In this case, the obtained maximum ion beam current is 110 mA when the discharge current is 1000 mA. In case whenmoderate values of extracted ion beam current are necessary, it is possible to operate the ion source even without the anode magneticsystem.. 2003 Elsevier B.V. All rights reserved.