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투명 평판 두께의 간섭 측정을 위한 굴절률 분산을 억제하는 위상 검출 알고리즘
전주림(Jurim Jeon),김성태(Sungtae Kim),김양진(Yangjin Kim) 대한기계학회 2020 대한기계학회 춘추학술대회 Vol.2020 No.12
Wavelength-tuning interferometry has been widely used to measure the optical thickness variation of a transparent plate. In the wavelength-tuning technique, interference signals can be distinguished by detecting the modulation frequencies of interference signals. As the modulation frequencies are proportional to the optical path difference, the necessary information about the optical thickness can be obtained via wavelength tuning. However, the refractive-index dispersion of the transparent plate and nonlinearity of the wavelength-tuning can lead to a modulation frequency shift. In this study, a new 21-sample phase-extraction algorithm that can suppress the effects of the refractive-index dispersion and nonlinearity was derived using a Fourier analysis in the frequency domain. The characteristics of the new algorithm were visualized in the frequency domain using a Fourier transform description. Finally, the optical thickness variation was measured by 21-sample algorithm and Fizeau interferometer.
굴절률 분산을 억제하는 위상 검출 알고리즘을 이용한 투명 평판 두께의 정밀 간섭 측정
전주림(Jurim Jeon),김성태(Sungtae Kim),김양진(Yangjin Kim) 대한기계학회 2022 大韓機械學會論文集A Vol.46 No.5
파장 주사 간섭법은 투명 평판의 광학적 두께 측정을 위해 사용된다. 파장 주사 간섭법을 사용할 때 참조면과 투명 평판 사이의 다중반사에 의해 간섭 신호들이 발생하며, 이 신호들의 주파수를 감지함으로써 신호를 구별하고, 투명 평판의 두께 정보를 얻을 수 있다. 하지만, 투명 평판 내에서 굴절률 분산과 파장 주사의 비선형성에 의해 변조 주파수가 정확한 값에서 벗어나게 되고, 이로 인해 측정 오차가 발생한다. 본 연구에서 굴절률 분산과 비선형성을 억제하고, 투명 평판의 광학적 두께를 정밀하게 측정할 수 있는 새로운 21 샘플 위상 검출 알고리즘을 도출하였다. 푸리에 표현법을 이용해 새로운 알고리즘을 주파수 영역에서 시각화하고, 투명 평판의 광학적 두께 측정 실험을 수행하여 새로운 알고리즘의 유용성을 검증했다. Wavelength tuning interferometry has been widely used to measure the optical thickness variation of a transparent plate. In the wavelength tuning technique, interference signals can be distinguished by detecting the modulation frequencies of interference signals. Because the modulation frequencies are proportional to the optical path difference, the necessary information about the optical thickness can be obtained via wavelength tuning. However, the refractive-index dispersion of the transparent plate and nonlinearity of the wavelength-tuning can result in a modulation frequency shift. In this study, a novel 21-sample phase-shifting algorithm that can suppress the effects of the refractive-index dispersion and nonlinearity was derived using a Fourier analysis in the frequency domain. The characteristics of the proposed algorithm were visualized in the frequency domain using a Fourier transform. Finally, the optical thickness variation was measured by the 21-sample algorithm and Fizeau interferometer.
광학적 표면 형상과 두께 측정을 위한 유연 위상 추출 알고리즘 개발
김환(Hwan Kim),전주림(Jurim Jeon),김성태(Sungtae Kim),김양진(Yangjin Kim) 대한기계학회 2022 대한기계학회 춘추학술대회 Vol.2022 No.11
When measuring the optical surface shape and thickness of a transparent plate, wavelength-turning interferometry has been widely used. However, when the wavelength-turning interferometer is utilized, the various types of the phase-shift errors occur. These errors include the errors due to the harmonic components, phase-shift linear and nonlinear errors. In this research, we proposed two 15-sample phase-extraction algorithms that can suppress these phase-shift errors. The first is the algorithm for optical surface shape that can suppress coupling errors between harmonic signals and phaseshift linear and nonlinear errors. The second is the algorithm for optical thickness that can compensate the spatially uniform error including the coupling errors. The characteristics of two 15-sample phase-extraction algorithms were discussed by Fourier representation in the frequency domain and characteristic polynomial in the complex plane. The error-suppression performance can be confirmed from the root-mean-square error for the first algorithm and calculated phase errors with the second algorithm.
광학적 표면 형상과 두께 측정을 위한 유연 위상 추출 알고리즘 개발
김환(Hwan Kim),전주림(Jurim Jeon),김성태(Sungtae Kim),김양진(Yangjin Kim) 대한기계학회 2022 대한기계학회 춘추학술대회 Vol.2022 No.11
When measuring the optical surface shape and thickness of a transparent plate, wavelength-turning interferometry has been widely used. However, when the wavelength-turning interferometer is utilized, the various types of the phase-shift errors occur. These errors include the errors due to the harmonic components, phase-shift linear and nonlinear errors. In this research, we proposed two 15-sample phase-extraction algorithms that can suppress these phase-shift errors. The first is the algorithm for optical surface shape that can suppress coupling errors between harmonic signals and phaseshift linear and nonlinear errors. The second is the algorithm for optical thickness that can compensate the spatially uniform error including the coupling errors. The characteristics of two 15-sample phase-extraction algorithms were discussed by Fourier representation in the frequency domain and characteristic polynomial in the complex plane. The error-suppression performance can be confirmed from the root-mean-square error for the first algorithm and calculated phase errors with the second algorithm.