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Electrically Enhanced Readout System for a High-Frequency CMOS-MEMS Resonator
Arantxa Uranga,Joan Lluis Lopez,Jordi Teva,Francesc Torres,Joan Josep Giner,Gonzalo Murillo,Gabriel Abadal,Nuria Barniol,Jaume Verd 한국전자통신연구원 2009 ETRI Journal Vol.31 No.4
The design of a CMOS clamped-clamped beam resonator along with a full custom integrated differential amplifier, monolithically fabricated with a commercial 0.35 m CMOS technology, is presented. The implemented amplifier, which minimizes the negative effect of the parasitic capacitance, enhances the electrical MEMS characterization, obtaining a 48×108 resonant frequency-quality factor product (Q×fres) in air conditions, which is quite competitive in comparison with existing CMOS-MEMS resonators.