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Sheng-Rui Jian,Hou-Guang Chen,Guo-Ju Chen,Jason S.C. Jang,Jenh-Yih Juang 한국물리학회 2012 Current Applied Physics Vol.12 No.3
The effects of O2 partial pressure during RF magnetron sputtering on the structural and nanomechanical properties of a-plane ZnO thin films were investigated by using X-ray diffraction (XRD) and nanoindentation techniques. The XRD and the transmission electron microscopy (TEM) selected area diffraction results indicate that the epitaxial relationship between ZnO thin films and Al2O3 substrates is ZnO ð1120Þ//Al2O3 ð1102Þ. The average values of the hardness and Young’s modulus of the a-plane ZnO films were found to decrease with increasing oxygen partial pressure. The cross-sectional TEM revealing the localized plastic deformation of ZnO thin films beneath the Berkovich indenter, indicating the prominent role played by the threading dislocations in the film deformation behavior. At higher indentation loadings, the sapphire substrate exhibits extensive deformation with narrow slip bands appearing on {0001} plane. However, no evidence of pressure-induced phase transformation, as well as cracking and/or delamination phenomena at the filmesubstrate interface was observed.