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Development and Test of Ion Source with Small Orifice Cold Cathode
G. E. Bugrov,S. K. Kondranin,E. A. Kralkina,V. B. Pavlov,K. V. Vavilin,Heon-Ju Lee 한국진공학회(ASCT) 2001 Journal of Korean Vacuum Science & Technology Vol.5 No.1
The paper represents the results of the development and the test of “cold cathode” ion source model with 5 ㎝ aperture where the glow discharge is utilized for generation of electrons in the cathode of the ion source. The results of probe measurements of the ion source are represented. The integral parameters such as electron energy distribution function(EEDF), electron density and mean electron energy, discharge voltage-current characteristics, and distribution of ion beam were studied.
Optimisation of cold cathode ion source model
G.E.Bugrov,S.K.Kondranin,E.A.Kralkina,V.B.Pavlov,D.V.Savinov,K.V.Vavilin,Heon-JuLee 한국물리학회 2003 Current Applied Physics Vol.3 No.6
This paper represents the results of the optimisation of cold cathode ion source model with 5 cm extraction aperture diameter. Inthis model, the glow discharge is utilised for generation of electrons in the cathode of the ion source. The various models withdierent lengths of cathode and anode are tested. The shortest model with 4.5 cm in length of cathode and anode each showssatisfactory operation and can be used in cases when the high values of extracted ion current are not required. The best model fromthe point of view of ion beam current value and eciency of the discharge is the model with cathode length of 7 cm and anode lengthof 7 cm. In this case, the obtained maximum ion beam current is 110 mA when the discharge current is 1000 mA. In case whenmoderate values of extracted ion beam current are necessary, it is possible to operate the ion source even without the anode magneticsystem.. 2003 Elsevier B.V. All rights reserved.
The frequency effect on atmospheric pressure RF discharge surface modification
Heon-Ju Lee,A.F. Alexandrov,E.A. Kralkina,V.B. Pavlov,V.P. Savinov,V. Yu. Sergeenko,I.B. Timofeev,G.E. Bugrov,K.V. Vavilin,V. Yu. Plaksin,Young Son Mok 한양대학교 세라믹연구소 2007 Journal of Ceramic Processing Research Vol.8 No.1
The physical mechanism of RF discharge at atmospheric pressure was studied at discharge frequencies of 13.56MHz and 0.6MHz. The discharge at 0.6 MHz had a clear filamentary structure, while discharge at 13.6 MHz had no separate filaments. The influence of discharge on the properties of polymer surfaces was also investigated, using two surface property indicators, the contact angle with water and adhesion strength. As a result of sample processing in the discharge, the wetting angle of polytetrafluorethylene (PTFE), polyethylene (PE), polyimide (PI) and polyvinyl chloride (PVC) decreased to 40o, 20o, 20o and 25o, respectively, and the adhesion of PTFE increased four fold. The physical mechanism of RF discharge at atmospheric pressure was studied at discharge frequencies of 13.56MHz and 0.6MHz. The discharge at 0.6 MHz had a clear filamentary structure, while discharge at 13.6 MHz had no separate filaments. The influence of discharge on the properties of polymer surfaces was also investigated, using two surface property indicators, the contact angle with water and adhesion strength. As a result of sample processing in the discharge, the wetting angle of polytetrafluorethylene (PTFE), polyethylene (PE), polyimide (PI) and polyvinyl chloride (PVC) decreased to 40o, 20o, 20o and 25o, respectively, and the adhesion of PTFE increased four fold.