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RISS 인기검색어
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- 저자 : Euisu Lim (검색결과 33 건)
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Finite Element Analysis and Fabrication of an Ultrasonic Milling System
Hyunse Kim,Euisu Lim,Kyunghan Kim 한국생산제조학회 2020 한국생산제조학회지 Vol.29 No.5
Ultrasound has been adapted in several industrial and manufacturing applications. In this study, an ultrasonic milling system, which can vibrate a rotating tool, was designed and fabricated. Firstly, a lead zirconate titanate (PZT) was designed using finite element analysis, and the obtained peak impedance value of 47.2 ㎑ agreed well with the fabricated PZT value of 48.0 ㎑. Additionally, an aluminum waveguide with two PZT actuators was analyzed, whose impedance characteristic was predicted to be 43.8 ㎑. Consequently, a milling waveguide was fabricated using the analysis results. The impedance value of the fabricated waveguide was measured to be 42.7 ㎑, which was consistent with the finite element analysis result with an error of 2.6 %. The rotational speed and power output were measured to be 10,001 rpm and 122.6 W. Thus, the developed milling waveguide can be applied to the milling process of high-hardness metals.
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Development of a Ultrasonic System for Nano-Surface Reformation Process
Hyunse Kim,Euisu Lim,Jong-Kweon Park 한국생산제조학회 2017 한국생산제조학회지 Vol.26 No.4
In this article, a 20 kHz Titanium (Ti) ultrasonic waveguide system for a nano-surface reformation process was designed and fabricated. First, finite element analysis using ANSYS software was performed to find the optimal dimensions. The obtained anti-resonance frequency for the Ti transducer with the piezoelectric device was 20.0 kHz, which value agreed well with the experiment result of 20.1 kHz (0.5% error). To test the system, chromium molybdenum steel (SCM) 435 was chosen as a test-piece. The result proved that the reformed depth was 36 μm. In addition, hardness was measured before and after the process. The value was changed from 14 HRC to 21 HRC, which is 50% increasing rate. Finally, the friction coefficient test result showed that the surface coefficient was reduced from 0.14 to 0.10 (28.6% reduction). Based on the results, the Ti ultrasonic equipment is regarded as a useful device for nano-scale surface reformation.
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김현세(Hyunse Kim),임의수(Euisu Lim) 대한기계학회 2021 大韓機械學會論文集B Vol.45 No.9
음파 및 초음파의 파동에너지는 세정, 의료용 센서, 제조 공정 분야에서 널리 사용되고 있다. 본 논문에서는 마이크로칩의 냉각에 응용될 수 있는 파동 냉각장치의 설계와 제작 공정에 대하여 설명하고 있다. 이 시스템을 설계할 때, 실험계획법을 이용하여 네 개의 설계 변수를 최적화하였다. 최적화된 값을 이용하여, 385 Hz급 음향 냉각기 시제품을 제작하고 성능 테스트를 수행하였다. 그 결과 1.5 V로 전압을 가하고, 단열을 한 경우에 제일 우수하였으며, ΔT=8.5°C 및 주변온도 대비 5.0°C를 냉각하였다. 마지막으로 냉각량을 계산한 결과 0.125 W의 성능을 예측하였다. 이러한 결과를 바탕으로 볼 때, 개발된 음향 냉각 장치는 향후 마이크로칩 등의 냉각 장치 개발에 활용될 수 있을 것으로 보인다. The wave energy of sound and ultrasound has been widely used in industries such as cleaning, medical sensors, and manufacturing. In this paper, the design and fabrication processes of a wave cooling system for microchip cooling applications are explained. When designing the system, the design of experiments was used to optimize four design parameters. Using the optimized values, a prototype cooler was fabricated that could work with a 385 Hz frequency, and a performance test was conducted. Consequently, when a 1.5 V voltage was applied with an insulation condition, ΔT=8.5°C and 5.0°C cooling were achieved. Finally, the cooling power was calculated, which showed the ability of 0.125 W. Based on these results, it is believed that the developed wave cooling system will be applicable in microchip cooling.
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Design and fabrication of an L-type waveguide megasonic system for cleaning of nano-scale patterns
Hyunse Kim,Yanglae Lee,Euisu Lim 한국물리학회 2009 Current Applied Physics Vol.9 No.2
An L-type waveguide megasonic system for nano-pattern cleaning that does not cause damage to the device was designed, manufactured and tested. The impedance of the quartz waveguide was simulated by using ANSYS finite element method (FEM) software. The peak value of the piezoelectric actuator alone was 1.107 MHz, which was the same as the experimentally measured value of 1.107 MHz (0.0% error). In addition, the maximum impedance value of the quartz waveguide with the actuator was 1.109 MHz, which agreed well with the measured value of 1.105 MHz (0.4% error). The acoustic pressure of a conventional megasonic system (1 MHz) and the L-type system was measured and compared. The results showed that the maximum values and standard deviations for the L-type system were decreased by 17% and 14%, respectively, compared with the conventional type. This suggests that the L-type would have higher particle removal efficiency and would be less likely to cause pattern damage. An L-type waveguide megasonic system for nano-pattern cleaning that does not cause damage to the device was designed, manufactured and tested. The impedance of the quartz waveguide was simulated by using ANSYS finite element method (FEM) software. The peak value of the piezoelectric actuator alone was 1.107 MHz, which was the same as the experimentally measured value of 1.107 MHz (0.0% error). In addition, the maximum impedance value of the quartz waveguide with the actuator was 1.109 MHz, which agreed well with the measured value of 1.105 MHz (0.4% error). The acoustic pressure of a conventional megasonic system (1 MHz) and the L-type system was measured and compared. The results showed that the maximum values and standard deviations for the L-type system were decreased by 17% and 14%, respectively, compared with the conventional type. This suggests that the L-type would have higher particle removal efficiency and would be less likely to cause pattern damage.
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A Quartz-bar Megasonic System for Nano-pattern Cleaning
Kim, Hyunse,Lee, Yanglae,Lim, Euisu Korean Society for Precision Engineering 2013 International Journal of Precision Engineering and Vol.14 No.10
A quartz-bar megasonic system for cleaning nano-particles with uniform acoustic pressures, was designed and manufactured. The impedance graph of the piezoelectric actuator used in the system was predicted using a finite element method (FEM); this gives the anti-resonance frequency of the piezoelectric actuator alone as 987 kHz, which is the same as the experimentally measured value. The impedance graph of the megasonic system was also analyzed. The predicted anti-resonance frequency of the system was 987 kHz, which agreed well with the measured frequency of 983 kHz. The acoustic pressure distributions of the developed system were examined using an acoustic pressure measurement system. The measured average acoustic pressure and its uniformity were compared with a commercially available product in terms of evaluating the system performance. The average acoustic pressure of the bar-type megasonic system was increased by 89%, while standard deviations of the bar-type megasonic system were decreased by 20%. This implies that the developed bar-type megasonic has an improved capability of particle removal efficiency (PRE) as well as better uniformity of the acoustic pressures.
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Design and Fabrication of a Horn-Type Megasonic Waveguide for Nanoparticle Cleaning
Hyunse Kim,Yanglae Lee,Euisu Lim IEEE 2013 IEEE transactions on semiconductor manufacturing Vol.26 No.2
<P>In this article, finite element analysis and fabrication of a horn-type megasonic waveguide for nanoparticle cleaning is carried out. To design the megasonic system, the impedance graph of the megasonic waveguide is analyzed using the finite element method software ANSYS. The predicted antiresonance frequency of the piezoelectric actuator used in the system is 1003 kHz, which agrees well with the measured value of a manufactured piezoelectric actuator 1005 kHz. In addition, the antiresonance frequency of a quartz waveguide with the lead zirconate titanate actuator is predicted as 1001 kHz, which also agrees well with the experimental data of 1003 kHz. Acoustic analysis to predict the acoustic pressure distribution of the waveguide is performed, and well distributed pressures in water is observed at the end of the waveguide. Also, the acoustic pressure of the developed quartz waveguide is measured and compared with that of a commercial megasonic system having 1 MHz operating frequency. The quartz waveguide system provides a 25% more acoustic pressure output. In addition, the standard deviation is decreased by 27%. Finally, a particle removal efficiency test shows over 91% particle removal after cleaning. These results suggest that the horn-type megasonic waveguide can be applied to the nanoparticle cleaning process.</P>
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