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스퀴즈 필름 현상을 고려한 마이크로 외팔보의 감쇠 특성
이진우(Jin Woo Lee),Ryan Tung,Arvind Raman 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.11
An extended theoretical model is presented to predict the dynamic behavior of flexible microcantilevers vibrating very close to a rigid substrate at low ambient pressures. Theoretical predictions are compared with experimental results. Theoretical frequency response functions of each extended theoretical model are derived for an inertially-excited microcantilever beam. Experiments to validate the extended models were carefully performed over 5 orders of Knudsen number
Squeeze-film damping of flexible microcantilevers at low ambient pressures: theory and experiment
Lee, Jin Woo,Tung, Ryan,Raman, Arvind,Sumali, Hartono,Sullivan, John P IOP 2009 JOURNAL OF MICROMECHANICS AND MICROENGINEERING - Vol.19 No.10
<P>An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and flexible microcantilevers affected by squeeze-film damping at low ambient pressures. Our approach extends recent continuum gas damping models (Veijola <A article='0960-1317/14/7/034'>2004 <I>J. Micromech. Microeng.</I> <B>14</B> 1109–18</A>, Gallis and Torczynski 2004 <I>J. Microelectromech. Syst.</I> <B>13</B> 653–9), which were originally derived for a rigid oscillating plate near a wall, to flexible microcantilevers for calculating and predicting squeeze-film damping ratios of higher order bending modes at reduced ambient pressures. Theoretical frequency response functions are derived for a flexible microcantilever beam excited both inertially and via external forcing. Experiments performed carefully at controlled gas pressures are used to validate our theoretical approach over five orders of the Knudsen number. In addition, we investigate the relative importance of theoretical assumptions made in the Reynolds-equation-based approach for flexible microelectromechanical systems.</P>