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3차원 미세형상 측정용 탄성힌지 기반 압전구동식 격자 스캐너
최기봉(Kee-Bong Choi),텐 알렉세이 대성(Aleksey-Deson Ten),이재종(Jae Jong Lee),김성현(Sung-Hyun Kim),고국원(Kook Won Ko),권순기(Soon Ki Kwon) 제어로봇시스템학회 2009 제어·로봇·시스템학회 논문지 Vol.15 No.8
This paper proposes a grating scanner which is driven by a stack-type piezoelectric element. The mechanism of the grating scanner is based on flexure hinges. Using some constraints, the compliant mechanism is designed and then verified by Finite Element Analysis. The designed compliant mechanism is manufactured by wire electro-discharge machining, and then integrated with a stack-type piezoelectric element for actuation and a capacitance displacement sensor for measuring ultra-precision displacement. Experiments demonstrates the characteristics and the performances of the grating scanner using the terms of working range, resonance frequency, bandwidth and resolution. The grating scanner is applicable to a Moire interferometry for measuring 3-dimensional microscopic surface.
김지원(Jiwon Kim),부경석(KyoungSeok Boo),Ten Aleksey-Deson,이상욱(SangUk Lee),권기옥(KiOk Kweon),박기태(KiTae Park),전종업(JongUp Jeon) 한국생산제조학회 2006 한국생산제조시스템학회 학술발표대회 논문집 Vol.2006 No.5
The nature of the signals collected by an SEM(Scanning Electron Microscope) in order to form images are all dependent on the detector used to collect them, and the quality of an acquired image is strongly influenced by detector performance. Therefore, the development of detector with high performance is very important in pulling up the resolution of SEM. This study describes an experiment and an evaluation on a supplementation with existent secondary electron detector, manufacturing a scintillator and conducting an analysis of secondary electron in chamber.
김지원(Jiwon Kim),부경석(KyoungSeok Boo),Ten Aleksey-Deson,이상욱(SangUk Lee),권기옥(KiOk Kweon),박기태(KiTae Park),전종업(JongUp Jeon) 한국생산제조학회 2006 한국공작기계학회 춘계학술대회논문집 Vol.2006 No.-
The nature of the signals collected by an SEM(Scanning Electron Microscope) in order to form images are all dependent on the detector used to collect them, and the quality of an acquired image is strongly influenced by detector performance. Therefore, the development of detector with high performance is very important in pulling up the resolution of SEM. This study describes an experiment and an evaluation on a supplementation with existent secondary electron detector, manufacturing a scintillator and conducting an analysis of secondary electron in chamber.