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이종현 경북대학교 센서기술연구소 1995 연차보고서 Vol.1995 No.-
자동차의 air-bag 장치에 실용될 수 있는 압저항형 단결정 실리콘 가속도센서를 개발하기 위하여 단결정 실리콘 미세구조의 제조방법을 확립하고, 단위공정의 검증을 통하여 일괄공정에 의한 PROTO-TYPE 칩을 제조하였다. 단결정 실리콘 미세구조는 다공질 실리콘 식각법을 이용한 마이크로머시닝을 사용하여 정확히 선택된 영역에만 air-gap을 형성하여 미세구조의 측면식각을 방지하는 선택확산법에 의한 실리콘 마이크로머시닝기술로 제조하였다. 가속도센서의 구조를 정의하기 위하여 사용된 시뮬레이션 툴은 기 개발된 SuperSAP 유한요소 패키지이며, 이를 이용하여 실리콘 미세구조부의 파라미터에 따른 특성을 시뮬레이션하여 4빔, 6빔 그리고 8빔의 3가지 형태에 대한 50G용 가속도센서를 설계하였다. 반도체 공정기술, 관성질량제조법 및 다공질 실리콘 마이크로머시닝을 사용하여 일괄공정으로 4빔, 6빔 그리고 8빔 브릿지형 가속도센서를 제조하였다. We have studied the silicon micromachining technique to fabricate a piezoresistive silicon acceleration sensor and fabricated a proto-type chip by batch process. Silicon microstructures was fabricated by using porous silicon etching This method prevent a side-etching of microstructure because selective diffused region is only formed an air-gap. We was simulated by SuperSAP finite element model for defining the structures of the acceleration sensor and designed acceleration sensor with 4-beam, 6-beam and 8-beam for measuring range of 50 acceleration. We fabricated 4, 6 and 8-beam piezoresistive acceleration sensor by batch-process using a semiconductor process technique, proof-mass fabrication method and porous silicon micromachinig.
이종현,강민제,이상준 제주대학교 산업기술연구소 2000 尖端技術硏究所論文集 Vol.11 No.2
The shortest path problem arises whenever we try to determine the shortest, cheapest, or most reliable path between one or many pairs of nodes in a network. The path search algorithm for the CNS(Car Navigation System) process the actual road map with complex data and should return the result within acceptable response time. In this paper. we studied the improvement of existing shortest path algorithm using the positioning information. The proposed algorithm was analyzed by the simulation with the real road map data in Jeju city. From the simulation result, it is known that the proposed algorithm required less memory usage and less computational time than the others.
광열편향분광법에 의한 수소화된 비정질 실리콘의 결함상태의 광흡수 스펙트럼에 관한 연구 : H by Photothermal Deflection Spectroscopy
이종현 연세대학교 대학원 1988 원우론집 Vol.15 No.2
ABSTRACT It is shown that photothermal deflection spectroscopy is an effective apparatus to evaluate a small absorption coefficient of thin film. It was identified with an undoping a-Si:H with Ts=100℃. And, the opticl absorption coefficient can be evaluated in a-Si:H following Ts=100℃ and Ts=200℃, 1% boron doping p-type, respecively. Signal detector to get the signal from position sensitive detector is an important component of this experiment and directly made. Sample holder is made of a brass bar and ccl4 chamber is made of pyrex and quartz plate. In this experiment, p-type a-Si:H with Ts=200℃ has much larger optical absorption coefficient than a-Si:H with Ts=100℃ in the region between 620nm and 400nm, i.e. 2.0eV ∼3.0eV. And a-Si:H with both Ts=100℃ and Ts=200℃ are almost the same in the region between 800nm and 620nm, i.e.1.5eV ∼2.0eV . The index of refraction is functions of temperature and pressure. Let the pressure be constant, and limited one dimension. PDS is a powerful tool to evaluate a small absorption coefficient of thin film.
精密測定 計器用 Stainless Steel의 加工과 熱處理에 따른 諸性質의 變化
李宗炫,安辛根,金學信 全北大學校 1988 論文集 Vol.30 No.-
In order to study the change of properties in Fe-13.3% Cr-0.37%C martensitic stainless steel for precision measuring gauge with the various heat treatments and plastic working, the change of micostructure, hardness and wear resistance were investigated. The results obtained in this experiment are as follows: 1. The high Cr alloy of 13% Cr martensitic stainless steel has selfhardening property which is not remarkably affected by the cooling rate, and also the hardness of this alloy was the highest value in the case of oil quenching after austenitized at 1000℃ for 1/3 hour. 2. The hardness and the corrosion resistance of low temperature tempering treatment are superior to high temperature tempering, especially the hardness of 200℃×2hr tempering treatment are superior to high temperature tempering, especially the hardness of 200℃×2hr tempering treatment in the case of air cooling after austenitized at 1050℃ for 1/3 hour is excellent. 3. The amount of retained austenite hardly existed in the case of air cooling after austenitized at 1000℃ for 1/3 hour, and the increase of hardeness with subzero-treatment is very small. 4. The property of hot working is good but the property of cold working is poor. And then, the secondary hardening with reheating treatment appeared at 400~450℃. 5. Bainite trasformation was occurred in the isothermal heat treatment, and the hardness and the wear resistnace of marquenching treatment are higher than martempering treatment. 6. The elevation of the wear resistance is proportional to the increase of the hardness obtained from the various heat treatments, especially the wear resistance of 200℃×2hr tempering treatment after air cooling is effective than after oil quenching and the wear mechanism is mainly a grinding abrasion.
이종현,박병우,정택상 충남대학교 의과대학 지역사회의학연구소 1980 충남의대잡지 Vol.7 No.2
One of the commonest complaints of women is pain of varing character situated in the pelvis, in the lower abdomen, and sometimes in the lower back which is attributed, rightly or wrongly, to some lesion in the reproductive organs. The pain is real but is caused by a functional disorder of the genital or extragenital organs. Treatment of pelvic pain was carried out with spasmolytic drug for 59 patients who had only cervical erosion, mild chronic cervicitis or negative gynecologic finding. The result was excellent and it is suggested that pelvic pain was resulted from spastic condition of some tissue or organs.