http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
- 中文 을 입력하시려면 zhongwen을 입력하시고 space를누르시면됩니다.
- 北京 을 입력하시려면 beijing을 입력하시고 space를 누르시면 됩니다.
RISS 인기검색어
- 검색키워드
- 저자 : 홍해남(Hae Nam Hong) (검색결과 3 건)
- 무료
- 기관 내 무료
- 유료
-
-
새로운 증착원으로 형성된 MOCVD TiN에 관한 연구
최정환,이재갑,김지용,이은구,홍해남,신현국,Choe, Jeong-Hwan,Lee, Jae-Gap,Kim, Ji-Yong,Lee, Eun-Gu,Hong, Hae-Nam,Sin, Hyeon-Guk 한국재료학회 1999 한국재료학회지 Vol.9 No.3
새로운 TiN 선구체인 TEMAT(tertrakis etylmethylamino titanium)과 암모니아를 이용하여 TiN 박막을 형성하였다. 단일 증착원으로 증착시킨 경우에는 $70~1050\AA$/min의 증착률을 얻을 수 있었으며 증착온도에 지배를 받았다. $275^{\circ}C$의 증착온도에서 $0.35\mu\textrm{m}$의 접촉창에서 약 90%의 도포성을 얻을 수 있었다. TEMAT에 암모니아를 첨가하였을 때 단일증착원에서 $3500~6000\mu\omega-cm$정도의 갑을 나타내던 비저상이 ~$800\mu\omega-cm$ 정도로 낮아졌으며 대기중 막의 안정성도 향상되었다. AES의 분석결과에서도 암모니아의 첨가로 현저한 산호와 탄소 함량의 감소를 나타내었다. 그러나 암모니아의 유량을 증가시킬수록 $0.5\mu\textrm{m}$ 접촉창에서 나타난 tiN 박막의 도포성은 감소하였고 이는 TEMAT와 암모니아의 기상 반응에의한 높은 첩착계수를 가진 중간 생성물의 형성에 의한 것으로 생각된다. 반응 부산물에 대한 분석은 QMS에 의해 이루어 졌으며 transamination 반응에 의한 TiN 증착 기구를 제시하였다. 추가적으로 XPS 분석으로 TEMAT와 암모니아의 반응에 의해 만들어지는 탄소는 금소기 탄소였으며 $\beta$-수소 반응이 transamination 반응과 경쟁적으로 일어남을 나타내었다. MOCVD TiN films were prepared from a new TiN precursor, tetrakis(etylmethylamino)titanium (TEMAT) and ammonia. Deposition of TiN films from a single precursor, TEMA T yielded the growth rates of $70 to 1050\AA$/min, depending on the deposition temperature. Furthermore, the excellent bottom coverage of -90% over $0.35\mu\textrm{m}$ contacts was obtained at $275^{\circ}C$. The addition of ammonia to TEMA T lowered the resistivity of as- deposited TiN film to ~ $800\mu\omega-cm$ from $3500~6000\mu\omega-cm$ and improved the stability of TiN film in air. Examination of the films by Auger electron spectroscopy(AES) showed that the oxygen and carbon contents decreased with the addition of ammonia. However, increasing ammonia flow rate decreased the bottom coverage of TiN films over $0.5\mu\textrm{m}$ contacts, probably due to the high sticking coefficient of intermediate species produced from the gas phase reaction of TEMA T and ammonia. Based on the byproduct gases detected by the quadrupole mass spectrometer (QMS), the transammination reaction was proposed to be responsible for TiN deposition. In addition, XPS analysis revealed that the carbon in the films made from TEMA T and ammonia was metallic carbon, suggesting that $\beta$-hydrogen activation process occurs competitively with the transammination reaction.
-
정경원(Gyung Won Jung),남정현(Jung Hyun Nam),이호정(Ho Jung Lee),홍해남(Hae Nam Hong),조영걸(Young Geol Jo) 대한바이러스학회 2000 Journal of Bacteriology and Virology Vol.30 No.1
The aim of this study was to investigate viral etiology in dilated cardiomyopathy (DCM) by polymerase chain reaction (PCR) or nested reverse transcription PCR (RT-PCR), and characterize the enteroviral RNA presented in the clinical specimens. Twenty-eight paraffin-embedded heart tissue samples were assayed to detect cytomegalovirus, herpes simplex virus type 1, type 2, parvovirus, adenovirus, and enterovirus (EV) with each specific primer. Of these 28 patients (mean age: 27, M: 24, F: 4), 26 were histologically diagnosed as DCM and 2 as myocardial infarction (MI). Nested RT-PCR detected enteroviral RNA in 7 (26.9%) of 26 patients with DCM, and none of patients with MI. And none of DNA viruses tested were detected from the samples. Amplified products were also genotyped by single-strand conformation polymorphism (SSCP). Three subtypes can be differentiated from 7 clinical specimens. Furthermore, direct sequence analysis was performed to determine whether genetic variation of EV is present in the explanted heart tissues from patients with DCM. Although most of the sequences among the wild isolates have the greatest similarity to those of coxsackievirus B3, there are specific regions of variable sequences (no 490 - no 510). The data suggest that enterovirus may be a major viral pathogen for the DCM in Korea and nucleotide sequence data indicate that coxsackievirus B3 may be a leading etiologic agent of DCM.
코리아스칼라연관 검색어 추천
이 검색어로 많이 본 자료
활용도 높은 자료
