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새로운 고경도 Ti-Mo-Si-N 코팅막의 합성 및 기계적 특성
전진우(Jin Woo Jeon),홍승균(Seung Gyun Hong),김광호(Kwang Ho Kim) 한국표면공학회 2006 한국표면공학회지 Vol.39 No.6
In this study, ternary Ti-Mo-N and new quaternary Ti-Mo-Si-N coatings were synthesized on steel substrates (AISI D2) and Si wafers by a hybrid coating system of arc ion plating (AIP) using Ti target and d.c. magnetron sputtering technique using Mo and Si targets in N₂/Ar gaseous mixture. Ternary Ti-Mo-N coatings were substitutional solid-solution of (Ti,Mo)N and showed maximum hardness of approximately 30 ㎬ at the Mo content of ~10 at. %. The Ti-Mo-Si-N coating with the Si content of 8.8 at. % was a composite consisting of fine (Ti,Mo)N crystallites and amorphous Si₃N₄ phase. The hardness of the Ti-Mo-Si(8.8 at. %)-N coatings exhibited largely increased hardness value of ~48 ㎬ due to the microstructural evolution to the fine composite microstructure and the refinement of (Ti,Mo)N crystallites. The average friction coefficient of the Ti-Mo-Si-N coatings largely decreased with increase of Si content. The microstructures of Ti-Mo-Si-N coatings were investigated with instrumental analyses of XRD, XPS, and HRTEM in this work.