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한제헌,강연준 한국소음진동공학회 2003 한국소음진동공학회 논문집 Vol.13 No.7
This paper presents a method for active noise control (ANC) in a duct by using a ring-tyPe smart foam. The ring-type smart foam consists of an elastic porous material of lining shape and a PVDF film embedded In the material. The PVDF element acts as a secondary sound source to reduce the noise. Active noise control using a ring-type smart foam is only effective locally because of the way to excite radially. To enlarge the quiet zone, the duct Is lined with additional acoustic foam between the smart foam and the error microphone. When cancellation path ks optimized by the LMS/RLS algorithm, the computation power is reduced while control performance Is maintained. The filtered-x LMS algorithm is used to minimize the error signal.
웨이퍼 수율 증대를 위한 상하부재형 리테이너링의 단면 영향도 연구
한제헌,최진수,김기현 대한산업공학회 2020 대한산업공학회지 Vol.46 No.1
In this paper, two-piece type retainer rings for the chemical-mechanical polishing proces of wafers wereinvestigated by aplying a finite element method and an improved cros-sectional shape of the retainering wassugested to maximize the available wafer area for building wafer-quality-control automation system. By usingthe experimental data, the finite element model was corelated and validated by showing thathe trend of theexperimental results was the same as that of the finite element analysis. Then, the improved cros-sectionalshape of the retainer ring to minimize the unavailable wafer area was sugested by using the validated finiteelement model. sugested to maximize the available wafer area for building wafer-quality-control automation system. By usingthe experimental data, the finite element model was corelated and validated by showing thathe trend of theexperimental results was the same as that of the finite element analysis. Then, the improved cros-sectionalshape of the retainer ring to minimize the unavailable wafer area was sugested by using the validated finiteelement model.