http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
- 中文 을 입력하시려면 zhongwen을 입력하시고 space를누르시면됩니다.
- 北京 을 입력하시려면 beijing을 입력하시고 space를 누르시면 됩니다.
RISS 인기검색어
- 검색키워드
- 저자 : 최정옥(Jeong-Og Choi) (검색결과 1 건)
- 무료
- 기관 내 무료
- 유료
-
순철박막의 증착속도, 미세구조 및 자성에 미치는 스퍼터링조건의 영향
한석희(Suk-Hee Han),김희중(Hi-Jung Kim),강일구(Il Koo Kang),최정옥(Jeong-Og Choi),이정중(Jung Joong Lee) 한국자기학회 1991 韓國磁氣學會誌 Vol.1 No.2
The influences of sputtering conditions on the deposition rate, the micro structure, and the magnetic properties have been studied in the pure iron thin films made by the RF magnetron sputtering. The deposition rate increases remarkably by applying the magnetic field on the substrate, and this effect is discussed with the increase of Ar ion.<br/> With increasing the input power the grain size and the lattice parameter are increased and the (110) plane is strongly developed. With Ar pressure the lattice parameter is decreased while the grain size is not changed.<br/> The smallest coercive force of 3 Oe is shown in the hard direction of Fe film sputtered at 60 W applying the magnetic field to the substrate. The coercive force is largely increased above 5mTorr due to the rough surface and the second phase. The Neel's theoretical relation between the film thickness and the coercive force can be applied to the sputtered Fe film with the thickness range of 50-200㎚.
ScienceON
DBpia연관 검색어 추천
이 검색어로 많이 본 자료
활용도 높은 자료
