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메탄, 메탄-수소 및 메탄-아르곤 플라즈마로부터 합성된 다이아몬드성 탄소막
최윤,홍진후,이행우,송정식,Choi, Y.,Hong, J. W.,Lee, H. W.,Song, J. S. 한국진공학회 1995 Applied Science and Convergence Technology Vol.4 No.1
Diamondlike carbon(DLC)films having good characteristics in mechanical and optical properties, were synthesized by rf-plasma enhanced chemical vapor deposition method. Methane, methane-hydrogen, or methane-argon were used as source gases. The infrared transparency and composition of the films were investigate. Especially, the anti-reflection effect of KLC film in infrared region was confirmed by depositing it on Ge/Si sample. When DLC films were deposited on the plastic substrates and thermal distortion, which were originated before and during deposition, respectively, played a role as a crack source of the films.