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Ion Beam Mixing과 급속열처리 방법을 이용한 Ti - SALICIDE용 TiSi₂ 박막 개선에 관한 연구
최병선(B. S. Choi),구경완(K. W. Koo),천희곤(H. G. Chun),조동율(T. Y. Cho) 한국진공학회(ASCT) 1992 Applied Science and Convergence Technology Vol.1 No.1
Ion beam mixing과 질소분위기에서 Rapid Thermal Annealing을 이용하여 형성된 TiSi₂ 박막의 표면과 계면의 물리적, 전기적 특성이 크게 개선되었으며, 기존 Ti-SALICIDE의 신뢰도 측면에서 문제가 될 수 있는 Oxide Spacer 상에서의 Lateral Silicide 형성이 최대한 억제될 수 있었다. 또한, Ti-SALICIDE 공정에서의 Ti/Si와 Ti/SiO₂의 Interaction을 반응조건별로 연구하였다. The surface and interface morphology as well as the sheet resistance, and uniformity of TiSi₂ film are significantly improved and the lateral titanium silicide growth over the oxide spacer is minimized by the use of ion beam mixing and rapid thermal annealing in nitrogen ambient. In addition, TiSi₂ film formations on Ti/Si and Ti/SiO₂ system were also studied.
오창섭,최병선,홍성선,황갑성,Oh, C.S.,Choi, B.S.,Hong, S.S.,Hwang, K.S. 대한설비공학회 1992 설비공학 논문집 Vol.4 No.4
Saltation occurs in horizontal flow of solid and gas when the carrier gas velocity is small enough to permit enough to settling of the solid particles within the transport line. So we should examine the pneumatic flow system to lessen the unbured carbon in the power plant. In this paper the saltation velocity was studied on the various solid flow rate in the constant pipe diameter and on the various temperatures of the flow gas. The air velocity in the power plant transport lines was also surveyed in order to compare with the saltation velocity. As the solid flow rate increased in the constant diameter, saltation velocity increased and as the temperater of the flow gas inereased in the transport line, saltation velocity also increased.