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RF 스위치 적용을 위한 박막 PZT 엑추에이터의 d<SUB>31</SUB> 구동과 d<SUB>33</SUB> 구동 특성 비교
신민재(M. J. Shin),서영호(Y. H. Seo),최두선(D-S. Choi),황경현(K-H. Hwang) 한국정밀공학회 2006 한국정밀공학회 학술발표대회 논문집 Vol.2006 No.5월
In this work, we present the comparison between d<SUB>31</SUB> and d<SUB>33</SUB> mode characterization using the PZT micro-actuator for large displacement. The PZT micro-actuator consisted of Si, PZT, and Pt layer on SOI wafer. The electrode shapes were laminated and interdigitated for d<SUB>31</SUB> and d<SUB>33</SUB> mode, respectively. In order to characterize the actuation mode, we measured the displacement using laser interferometer. The maximum displacement of d<SUB>31</SUB> mode was 12.2㎛ at 10V, the actuation characterization of d<SUB>31</SUB> was better than that of d<SUB>33</SUB> mode. We estimated that displacement of d<SUB>33</SUB> mode would be larger than that of d<SUB>31</SUB> above 30V.
최두선(D. S. Choi),제태진(T. J. Je),황경현(K. H. Hwang),강윤희(Y. H. Kang) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.4
Currently, product of optical collimator for optical communication is depending on handiwork, and<br/> some companies are propelling semi-automatic system composite of manual and automatic operations.<br/> In this point of time, the importance of automatic system of optical collimator for optical<br/> communication is taking its place as a core technology in the development of parts with<br/> high-efficiency of optical communication. In order to develop such an optical collimator in this study,<br/> we designed an automatic assembly system, and developed a software for the system operation. At a<br/> result of that, we could carry out a single work process individually running processes of collimator<br/> fabrication, a constant work process constantly running all of the processes, and performance evaluation<br/> of the collimator.