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자기력을 이용한 비접촉 6자유도 미소위치결정 기구의 개발-설계, 모델링 및 제어-
최기봉,박기환,김수현,곽윤근,Choi, Kee-Bong,Park, Kyi-Hwan,Kim, Soo-Hyun,Kwak, Yoon-Keun 대한기계학회 1996 大韓機械學會論文集A Vol.20 No.4
A magnetically levitated micro-positioner is implemented to avoid mechanical friction and increase precision. Since magnetic levitation system is inherently unstable, most concern is focused on a magnetic circuit design to increase the system dynamic stability. For this, the proposed levitation system is constructed by using an antagonistic structure which permits a simple design and robust stability. From the dynamic equations of motion, it is verified that the proposed magnetically levitated system is decoupled in 6 degree-of-freedom motion. Experimental results are presented in terms of time response and accuracy.
2 개의 병진-병진 관절형 병렬 탄성 메커니즘을 갖는 압전구동 소형 XY 스테이지
최기봉(Kee-Bong Choi),이재종(Jae Jong Lee),김기홍(Gee Hong Kim),임형준(Hyung Jun Lim) Korean Society for Precision Engineering 2013 한국정밀공학회지 Vol.30 No.12
In this paper, a miniaturized stage with two prismatic-prismatic joints (2-PP) type parallel compliant mechanism driven by piezo actuators is proposed. This stage consists of two layers which are a motion guide layer and an actuation layer. The motion guide layer has 2-PP type parallel compliant mechanism to guide two translational motions, whereas the actuation layer has two leverage type amplification mechanisms and two piezo actuators to generate forces. Since the volume of the stage is too small to mount displacement sensors, the piezo actuators embedding strain gauge sensors are chosen. With the strain gauge-embedded piezo actuators, a semi-control is implemented, which results in hysteresis compensation of the stage. As the results, the operating range of 30 ㎛, the resolution of 20 ㎚, and the bandwidth of 400 ㎐ in each axis were obtained in the experiments.
긴 유연힌지를 갖는 컴플라이언스 메커니즘의 동역학 모델
최기봉(Kee-Bong Choi) Korean Society for Precision Engineering 2005 한국정밀공학회지 Vol.22 No.3
A dynamic model for flexure hinge-based compliant mechanisms is derived. The dynamic model of the previous works do not well describe the behaviors of rigid bodies in the compliant mechanism when the length of the flexure hinge is long. In this study, the effect on the length of the flexure hinge is pointed out and then the dynamic model is derived to overcome the length effect. For verification, modal analyses are carried out using the proposed dynamic model and FEM (Finite Element Method). Finally they are compared by the terms of modal frequency. As the result, the proposed dynamic model can be used in design and analysis of the compliant mechanism.
Min-Max 알고리즘을 이용한 피에조 구동형 스테이지의 최적설계 및 성능평가
최기봉(Kee-Bong Choi),한창수(Chang Soo Han) Korean Society for Precision Engineering 2005 한국정밀공학회지 Vol.22 No.9
This paper presents an optimal design and the performance evaluation of two-axis nano positioning stage with round notched flexure hinges. A flexure hinge mechanism with round notched flexure hinges is to guide the linear motions of a moving plate in the nano positioning stage. A Min-Max algorithm is applied to the design of the flexure hinge mechanism for nano positioning stage. In the design process, the structure of the flexure hinge mechanism is fixed, then the radius of a round hole and the width of two round holes are chosen as design variables, and finally the design variables are calculated by the Min-Max algorithm. The machined flexure hinge mechanism, stack type PZTs for actuation and capacitance type displacement sensors for position measurement are assembled into the nano positioning stage. The experimental results of the manufactured nano positioning stage show the first modal resonance frequency of 197 ㎐, the operating range of 40 ㎛, and the resolution of 3 ㎚.
십자형 플렉셔 힌지를 갖는 압전소자 구동형 회전 스테이지의 해석
최기봉(Kee-Bong Choi),이재종(Jae Jong Lee),김민영(Min Young Kim),고국원(Kuk Won Ko) Korean Society for Precision Engineering 2007 한국정밀공학회지 Vol.24 No.12
A flexure hinge-based compliant stage driven by stack-type piezoelectric elements has high precision motion but small operational range due to the characteristics of the piezoelectric element. Since the common flexure hinges can be broken by excessive deflection when the displacement is amplified by a high amplification ratio, a flexure hinge mechanism for large deflection is required. A cartwheel-type flexure hinge has an advantage of larger deflection compared with the common flexure hinges. This study presents a rotation stage with cartwheel-type flexure hinges driven by a stack-type piezoelectric element. The characteristics and the performance of the rotation stage are described by the terms of principal resonance frequency, amplification ratio of rotational displacement, maximum rotational displacement and block moment, in which the terms are analyzed by geometric parameters of the rotation stage. The analyzed results will be used as the guideline of the design of the rotation stage.
접촉식 리소그라피의 정렬공정을 위한 압전구동 초정밀 스테이지
최기봉(Kee-Bong Choi),이재종(Jae Jong Lee),김기홍(Gee Hong Kim),임형준(Hyung Jun Lim) 한국생산제조학회 2011 한국생산제조학회지 Vol.20 No.6
This paper proposed an alignment stage driven by piezo actuators for alignment process of a contact-type lithography. Among contact-type lithography processes, an UV-curable nanoimprint process is an unique process to be able to align patterns on upper and lower layers. An alignment stage of the UV-curable nanoimprint process requires nano-level resolution as well as high stiffness to overcome friction force due to contact moving. In this paper, the alignment stage consists of a compliant mechanism using flexure hinges, piezo actuators for high force generation, and capacitive sensors for high-resolution measurement. The compliant mechanism is implemented by four prismatic-prismatic compliant chains for two degree-of-freedom translations. The compliant mechanism is composed of flexure hinges with high stiffness, and it is directly actuated by the piezo actuators which increases the stiffness of the mechanism, also. The performance of the ultra-precision stage is demonstrated by experiments.