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박창용(Chang-Yong Park),권현규(Hyun-Kyu Kweon),조지준(Zhijun Zhao) 한국기계가공학회 2013 한국기계가공학회지 Vol.12 No.1
A new precision positioning mechanism for stage was been developed by Displacement Magnification Device(DMD) in this paper. The DMD was composed of the beam and multilayer piezoelectric actuators. The theoretical and experimental analysis of DMD to enlarge displacement more then 50times were discussed. And the 2-axis stage by using displacement amplification apparatus was added in the new DMD, and it was able to do it through finite element analysis and experiment. As the results, the magnification of DMD can be obtained about 100㎛ displacement to the 10V input voltage(1.5㎛). And the about 50nm of linearity error in the 30㎛ measurement range and 20times of the amplification in displacement can be measured. In addition, the experimental results are confirmed the possibility of millimeter displacement characteristics and correspond to finite element analysis results.