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산소 플라즈마를 이용하여 원거리 플라즈마 원자층 증착법으로 형성된 하프늄 옥사이드 게이트 절연막의 특성 연구
조승찬,전형탁,김양도,Cho, Seung-Chan,Jeon, Hyeong-Tag,Kim, Yang-Do 한국재료학회 2007 한국재료학회지 Vol.17 No.5
Hafnium oxide $(HfO_2)$ films were deposited on Si(100) substrates by remote plasma-enhanced atomic layer deposition (PEALD) method at $250^{\circ}C$ using TEMAH [tetrakis(ethylmethylamino)hafnium] and $O_2$ plasma. $(HfO_2)$ films showed a relatively low carbon contamination of about 3 at %. As-deposited and annealed $(HfO_2)$ films showed amorphous and randomly oriented polycrystalline structure. respectively. The interfacial layer of $(HfO_2)$ films deposited using remote PEALD was Hf silicate and its thickness increased with increasing annealing temperature. The hysteresis of $(HfO_2)$ films became lower and the flat band voltages shifted towards the positive direction after annealing. Post-annealing process significantly changed the physical, chemical, and electrical properties of $(HfO_2)$ films. $(HfO_2)$ films deposited by remote PEALD using TEMAH and $O_2$ plasma showed generally improved film qualities compare to those of the films deposited by conventional ALD.
원거리 플라즈마 ALD법으로 증착한 ZrN박막의 특성 연구
조승찬,황윤철,이근우,한세진,김인배,전형탁,김양도,Cho Seung Chan,Hwang Yoon Cheol,Lee Keun Woo,Han Se Jin,Kim In Bae,Jeon Hyeongtag,Kim Yangdo 한국재료학회 2005 한국재료학회지 Vol.15 No.9
The barrier characteristics of ZrN films deposited by remote plasma enhanced atomic layer deposition(PEALD) using TDEAZ and $N_2$ remote plasma have been investigated under various deposition conditions such as temperatures, plasma power and processing pressures. ZrN films showed generally improved properties as the processing temperature, pressure and plasma power increased. The optimized processing temperature, plasma power and pressure were $300^{\circ}C$, 200 Watt and 1 torr. respectively ZrN films deposited at the optimized processing conditions showed the carbon contents and resistivity of $6at.\%$ and $400{\mu}{\Omega}cm$ respectively.
유기물 광분해용 니켈-TiO₂ 복합도금 전극 특성에 관한 연구
최철영(Chul Young Choi),조승찬(Seung Chan Cho),류영복(Young Bok Ryu),김영석(Young Seok Kim),김형찬(Hyoung Chan Kim),김양도(Yang Do Kim) 한국표면공학회 2007 한국표면공학회지 Vol.40 No.3
Many fundamental studies have been carried out regarding waste water and hazardous gas treatment technology using the photolysis effect of TiO₂. However, photolysis of both organic and organic-inorganic binders immobilizing TiO₂ makes permanent use impossible. In this study we manufactured a catalytic electrode by nickel-TiO₂ composite plating in order to immobilize TiO₂. The surface properties according to the current density changes of cathode and concentration changes of TiO₂ powder in nickel plating bath has been analysed with EDX, XRF, SEM, Raman spectrometer etc. The characterization of the catalytic electrode in decomposition of organic compound has been obtained by using UV-Visible spectrophotometer through analysing concentration changes of methyl orange solution containing the catalytic electrode vs. time with projecting UV-light in the solution. The study shows that a catalytic electrode of nickel-TiO₂ composite plating with high-efficiency in decompostion of organic compound has been formed under high concentration of TiO₂ powder and low current density of cathode.
FeCo 자성 금속 중공형 섬유 고분자 복합재의 전자파 차폐 특성 연구
최재령 ( Jae Ryung Choi ),정병문 ( Byung Mun Jung ),최우혁 ( U Hyeok Choi ),조승찬 ( Seung Chan Cho ),박가현 ( Ka Hyun Park ),김원정 ( Won Jung Kim ),이상관 ( Sang Kwan Lee ),이상복 ( Sang Bok Lee ) 한국복합재료학회 2015 Composites research Vol.28 No.6
무전해 도금을 통해 제조한 FeCo 자성 금속 중공형 섬유와 EPDM 고분자를 이용하여 전자파 차폐 복합재를 제작하였다. 열처리 공정을 통하여 섬유의 종횡비를 제어하였으며 중공형 구조로 섬유를 제조한 후, 이를 EPDM수지에 첨가하여 복합재를 제조하였다. 자성 금속 중공형 섬유의 종횡비가 클수록 낮은 표면 저항 특성과 우수한 전자파 차폐 성능을 나타내었다. 약 100 μm 길이의 자성 금속 중공형 섬유를 이용한 두께 150 μm 전자파 차폐 복합재의 경우 밀도 1.18 g/cm3, 약 30 ohm/sq의 표면 저항, 그리고 30 dB의 전자파 차폐 성능을 나타내었다. 이는 종횡비가 큰 섬유에 의한 퍼콜레이션 임계치 이상의 전도성 네트워크 형성과 더불어, 낮은 표면 저항에 기인한 임피던스 차이에 의한 반사 손실 증가, 흡수 손실, 그리고 다중 내부 반사 손실에 의하여 우수한 전자파 차폐 성능을 나타내는 것으로 판단된다. Electromagnetic interference shielding composite with low density (1.18 g/cm3) was fabricated using electroless plated FeCo magnetic metal hollow fibers and ethylene propylene diene monomer (EPDM) polymer. Aspect ratio of the fibers were controlled and their hollow structure was obtained by heat treatment process. The FeCo hollow fibers were then mixed with EPDM to manufacture the composite. The higher aspect ratio of the magnetic metal hollow fibers resulted in high electromagnetic interference shielding effectiveness (30 dB) of the composite due to its low sheet resistance (30 ohm/sq). The enhanced electromagnetic interference shielding effectiveness was mainly attributed to the formation of conducting network over the percolation threshold by high aspect ratio of fibers as well as an increase of the reflection loss by impedance mismatch owing to low sheet resistance, absorption loss, and multiple internal reflections loss.