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원자현미경을 이용한 나노구조체의 각도측정 방법 및 조건
조상준(Cho Sang-Joon),안병운(Ahn Byung-Woon),김준휘(Kim Joonhui),정상한(Chung Sang Han) 표준인증안전학회 2012 표준인증안전학회지 Vol.2 No.1
Invention of the atomic force microscopy (AFM) has provided a powerful measurement capability for sub-nano scale science and technology. Since invention, AFM has been significantly improved, and numerous innovative mechanisms and measuring modes have been developed. As the progress of miniaturization in patterns and photoresist structures in semiconductor, microelectronics, and glass industry, along with the fast advance of the extremely versatile nanotechnology applications, in a great number of industrial processes calls for reliable and comparable quantitative dimensional measurements in the micro- and submicrometer range. To make matters worse, there has been an increasing demand for measuring characteristics of sidewalls like line edge and line width roughness, wave pattern of sidewalls and angles of overhang features. Realizing that currently available CD-AFM or CD-SEM techniques do not satisfy this demand, new measurement standards are required for angles of micro- and nano-structures. In spite of the many capabilities of AFM, quite a few conditions have to be considered to measure critical dimensions (CD) quantitatively with repeatability and reproducibility. Piezo hysteresis, drift, tip shape and consistency, scanner orthogonality and other things are included in the conditions. The requirements and process to measure critical angle of nano- and micro-structure using AFM will be described in this paper.
조상준(Cho Sang-Joon) 우리문학회 2009 우리文學硏究 Vol.0 No.27
신규호 시인의 초기시는 주로 모더니즘 가운데 쉬르리얼리즘적 경향이 짙다고 하겠다. 쉬르리얼리즘은 기존의 예술적 방법까지 버릴 만한 각오를 가지고, 이전까지 밝혀지지 않은 내면의 세계를 조명할 수 있는 갖가지 방법을 탐색하는 것이 특징이다. 신규호 시인의 중기시의 세계가 초기시의 쉬르적 경향을 벗어나 「진단시」 동인으로 가입하면서 전통의식과 역사의식이 짙은 작품의 세계로 변모하였음을 확인할 수 있다. 초기시에 보이는 쉬르적 실험 의식은 사라져 버리고, 전통적 소재를 제재로 한 온건한 진술과 이미저리로 변모되었음을 확인 할 수 있다. 신규호 시인의 후기시는 한국적 전통성을 계승하면서도, 한편으로 그가 초기에 거쳤던 모더니즘적 기법으로 수련된 이미지의 형상화 작업을 작품에 살려가고 있음이 확인된다. 다시 말해, 초기와 중기의 상반된 시세계가 변증적으로 지양, 통합된 세계, 즉, 전통성의 현대적 변용을 이루고 있다. 신규호 시인의 후기시는 그가 거쳐 온 서구적 방법론에 의해 강화된 입체적 이미지를 바탕으로 한 전통적 관조와 사색의 현대적 변용이라는 특질을 지닌다. 특히, 정서면에서 한국시의 전통의식을 계승하고, 그것을 개성적으로 변용함으로써 바람직하게 전통의식 계승을 성취하고 있음도 확인 할 수 있었다. 신규호는 한국 현대시의 전통정신을 험난한 역경 속에서도 우리 민족 의식을 지켜온 시인이다. SHIN KYU-HO poet's early poem is close to modernism, especially surrealism. In surrealism, he characteristically makes up his mind to discard established artistic method, searchs to various method illuminating inner world. We can find that SHIN KYU-HO poet's middle age's poem is out of early poem's surrealistic character, and contains traditional, historical consciousness joining 「 Jindansi」. SHIN KYU-HO poet's middle age's poem extract early poem's surrealistic experimental trend, accept moderately statement and imagery based on traditional subject matter. SHIN KYU-HO poet's latterly poem succeeds Korean tradition, on the other hand, includes on his poem 형상화 of image trained by method of modem ism on early age. In other word, early and middle age's directly-opposed ideas dialectically is combined to traditional character's modem acculturation. SHIN KYU-HO poet's latterly poem features traditional contemplation and philosophizing's modem acculturation based on three dimensional image strengthened by western methodology he passing by. Especially, we can rind that his poem succeeds Korean poem's traditional consciousness, and succeeds advisability by acculturating it characteristically. SHIN KYU-HO poet is inheritance ought to preserve because he preserve Korean poem's tradition on adversity.
원자현미경을 이용한 생물시료의 생물리학적 분석기법 개발과 소개
조상준(Sang-Joon Cho),전기평(Kipyoung Jeon),최수경(Sookyung Choi) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.11
In order to develop fundamental nature-inspired technologies for future, various fields of science and technology have been invested to understand the complex biological system. Among the vast array of technologies, nanotechnological devices like the Scanning Probe Microscope (SPM) start to open new chapter of understanding structure, function, and regulation of this complex biological system at the nanometer level in real time with a hope for new scientific discovery. SPM provides not only high-resolution imaging of cellular structures below the optical limit, but also evaluation of biophysical properties of the biological samples and monitoring dynamics and processes even in real time. SPM technique promises direct access to the both structural and functional information of a biological sample at unprecedented high spatial resolution that no other techniques are able to provide currently. We will introduce the general applications and new development of SPM in life science research.
공기부상방식 웨이퍼 이송시스템의 추진 노즐 크기에 따른 추진력계수에 관한 연구
문민호,조상준,황영규,Moon, In-Ho,Cho, Sang-Joon,Hwang, Young-Kyu 한국반도체디스플레이기술학회 2005 반도체디스플레이기술학회지 Vol.4 No.1
An air levitation type wafer transfer system is composed of control and transfer track. Wafer transfer speed is mainly affected by air velocity of propulsion nozzle. In this study, the propulsion force coefficient was evaluated experimentally for the nozzle with 0.5mm, 0.8mm, and 1.0mm diameter. As a result, the propulsion force was largest in the smallest size of nozzle at same air velocity. The propulsion force coefficient of nozzle increases with reducing diameter of nozzle. This increment of propulsion force coefficient was enlarged remarkably at the 0.5mm diameter of nozzle.