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마스크리스 리소그래피 방법을 이용한 마이크로 히터 패턴 설계 및 제작
조용규(Yong Kyu Cho),신봉철(Bong Cheol Shin),조명우(Myeon Woo Cho) 한국생산제조학회 2011 한국생산제조시스템학회 학술발표대회 논문집 Vol.2011 No.4
Recently, micro heater is being researched due to development of electron and bio industries. In this study, maskless lithography system using DMD(digital micromirror device) was developed for generating of micro pattern, and research was performed to design and fabrication of micro heater pattern using this system. Thermal distribution was verified through thermal analysis for designed pattern, and experiment of pattern generating was performed at DFR(dry film resist). Generated noncontinuous pattern due to gap of DMD was changed to continuous pattern by control of focal length. As a result, micro heater pattern of 40 μm width was generated.