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정현우(H. U. Jung),박만진(M. J. Park),박근(K. Park),김동환(D. H. Kim),장동영(D. Y. Jang) 한국생산제조학회 2007 한국공작기계학회 춘계학술대회논문집 Vol.2007 No.-
The present study covers the design and analysis of a thermionic scanning electron microscope(SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. For a systematic design of the electron optical system, the beam emission characteristics and relevant trajectories are investigated through numerical analyses tracing the ray path of the electron beams.
정현우(H. U. Jung),박만진(M. J. Park),박근(K. Park),김동환(D. H. Kim),장동영(D. Y. Jang) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.11
The scanning electron microscope (SEM) is one of the most popular instruments available for the measurement and analysis of the micro/nano structures. It is equipped with an electron optical system that consists of an electron beam source, magnetic lenses, apertures, deflection coils, and a detector. The magnetic lenses play a role in refracting electron beams to obtain a focused spot using the magnetic field driven by an electric current from a coil. A SEM column usually contains two condenser lenses and an objective lens. The condenser lenses generate a magnetic field that forces the electron beams to form crossovers at desired locations. The objective lens then focuses the electron beams on the specimen. The present work concerns finite element analysis for the electron magnetic lenses so as to analyze their magnetic characteristics. To improve the performance of the magnetic lenses, the effect of the excitation current and polepiece design on the amount of resulting magnetic fields and their peak locations are analyzed through the finite element analysis.
정현우(H. U. Jung),박만진(M. J. Park),박근(K. Park),김동환(D. H. Kim),장동영(D. Y. Jang) 한국생산제조학회 2007 한국생산제조시스템학회 학술발표대회 논문집 Vol.2007 No.5
The present study covers the design and analysis of a thermionic scanning electron microscope(SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. For a systematic design of the electron optical system, the beam emission characteristics and relevant trajectories are investigated through numerical analyses tracing the ray path of the electron beams.
정현우(H. U. Jung),박만진(M. J. Park),박근(K. Park),김동환(D. H. Kim),장동영(D. Y. Jang) 한국생산제조학회 2007 한국생산제조학회지 Vol.16 No.6
The present study covers numerical analysis of a thermionic scanning electron microscope(SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. For a systematic design of the electron optical system, the beam trajectories are investigated through numerical analyses by tracing the ray path of the electron beams, and the quality of resulting image is evaluated from the analysis results.